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Micromachines
Special Issues
New Generation of MEMS/NEMS Sensors and Actuators
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New Generation of MEMS/NEMS Sensors and Actuators

A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "E：Engineering and Technology".

Deadline for manuscript submissions: closed (30 November 2023) | Viewed by 961

Special Issue Editors

Dr. Hassen M. Ouakad

E-Mail Website
Guest Editor
Mediterranean Institute of Technology, South Mediterranean University, Tunis 1053, Tunisia
Interests: computational mechanics; MEMS; NEMS; mechanical vibration; linear and nonlinear dynamics; system control; smart mechatronics systems; energy scavenging/harvesting
Special Issues, Collections and Topics in MDPI journals
Dr. Ayman Alneamy

E-Mail Website
Guest Editor
Department of Mechanical Engineering, Jazan University, Jazan 45142, Saudi Arabia
Interests: MEMS/NEMS; fabrication; nonlinear dynamics; energy harvesters

Special Issue Information

Dear Colleagues,

Micro-Electro-Mechanical Systems (MEMS) designate smart and innovative technology integrating small devices with a combination of miniature mechanical and electrical components. They have emerged as a crucial component in a variety of technological applications, including wireless communication systems, biosensors, and frequency resonators. Most of these devices are fabricated using bulk micro-machining, surface micro-machining, and lithography processes and their assembly is based on integrating semiconductors’ circuitry processes, such as PolyMUMPs, SOIMUMPs, and PiezoMUMPs. These tiny devices are used principally as either sensors or actuators and are central to the revolution of the latest industrial technologies due to their main advantages, such as their small size and their low cost of production. Furthermore, these devices can provide significant improvements in terms of performance compared to large macro-scale devices. Accordingly, this Special Issue seeks to promote research papers, communications, and review articles that mainly focus on modeling techniques, novel designs, simulation, and analysis tools of MEMS and NEMS using experimental validations. 

Dr. Hassen M. Ouakad
Dr. Ayman Alneamy
Guest Editors

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Micromachines is an international peer-reviewed open access monthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2600 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

Keywords

  • MEMS
  • fabrication
  • nonlinear dynamics
  • vibration and energy harvesters

Published Papers (1 paper)

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Research

15 pages, 4559 KiB  
Article
Study of a High-Precision Read-Out Integrated Circuit for Bridge Sensors
by Xiangyu Li, Pengjun Wang, Hao Ye, Haonan He and Xiaowei Zhang
Micromachines 2023, 14(11), 2013; https://doi.org/10.3390/mi14112013 - 29 Oct 2023
Cited by 1 | Viewed by 743
Abstract
Bridge sensors are widely used in military and civilian fields, and their demand gradually increases each year. Digital sensors are widely used in the military and civilian fields. High-precision and low-power analog-to-digital converters (ADCs) as sensor read-out circuits are a research hotspot. Sigma-delta [...] Read more.
Bridge sensors are widely used in military and civilian fields, and their demand gradually increases each year. Digital sensors are widely used in the military and civilian fields. High-precision and low-power analog-to-digital converters (ADCs) as sensor read-out circuits are a research hotspot. Sigma-delta ADC circuits based on switched-capacitor topology have the advantages of high signal-to-noise ratio (SNR), good linearity, and better compatibility with CMOS processes. In this work, a fourth-order feed-forward sigma-delta modulator and a digital decimation filter are designed and implemented with a correlated double sampling technique (CDS) to suppress pre-integrator low-frequency noise. This work used an active pre-compensator circuit for deep phase compensation to improve the system’s stability in the sigma-delta modulator. The modulator’s local feedback factor is designed to be adjustable off-chip to eliminate the effect of process errors. A three-stage cascade structure was chosen for the post-stage digital filter, significantly reducing the number of operations and the required memory cells in the digital circuit. Finally, the layout design and engineering circuit were fabricated by a standard 0.35 μm CMOS process from Shanghai Hua Hong with a chip area of 9 mm2. At a 5 V voltage supply and sampling frequency of 6.144 MHz, the modulator power consumption is 13 mW, the maximum input signal amplitude is −3 dBFs, the 1 Hz dynamic range is about 118 dB, the modulator signal-to-noise ratio can reach 110.5 dB when the signal bandwidth is 24 kHz, the practical bit is about 18.05 bits, and the harmonic distortion is about −113 dB, which meets the design requirements. The output bit stream is 24 bits. Full article
(This article belongs to the Special Issue New Generation of MEMS/NEMS Sensors and Actuators)
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