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Micromachines
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Advances in Piezoelectric Sensors, Transducers and Harvesters, 2nd Edition
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Advances in Piezoelectric Sensors, Transducers and Harvesters, 2nd Edition

A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "A：Physics".

Deadline for manuscript submissions: closed (30 May 2023) | Viewed by 10701

Special Issue Editors

Dr. Lin Zhang

E-Mail Website
Guest Editor
Media Lab, Massachusetts Institute of Technology (MIT), Cambridge, MA 02139, USA
Interests: piezoelectric composites for sensors and transducers; dielectric composites for energy storage; conducting composites for multifunctional applications; flexible/stretchable electronics
Special Issues, Collections and Topics in MDPI journals
Dr. Chunlong Fei

E-Mail Website
Guest Editor
School of Microelectronics, Xidian University, Xi’an 710071, China
Interests: piezoelectric devices; ultrasonic transducers; acoustic metamaterials; acoustic tweezers
Special Issues, Collections and Topics in MDPI journals
Dr. Yang Yang

E-Mail Website
Guest Editor
Department of Mechanical Engineering, San Diego State University, San Diego, CA 92182, USA
Interests: energy harvesting; 3D printing; bioinspired structures; multifunctional composites; wearable sensors
Special Issues, Collections and Topics in MDPI journals
Dr. Jianguo Ma

E-Mail Website
Guest Editor
School of Instrumentation and Optoelectronic Engineering, Beihang University, Beijing 100191, China
Interests: piezoelectric ultrasound transducers; multi-frequency ultrasound transducers; optical ultrasound sensing; biomedical ultrasound imaging and therapy; quantitative ultrasound for intelligent diagnosis
Special Issues, Collections and Topics in MDPI journals
Dr. Zeyu Chen

E-Mail Website
Guest Editor
College of Mechanical and Electrical Engineering, Central South University, No.605 South Lushan Road, Changsha 410083, China
Interests: photoacoustic imaging; dermatology; molecular probe; drug delivery system; immunotherapy
Special Issues, Collections and Topics in MDPI journals

Special Issue Information

Dear Colleagues,

The recent advances in materials science, mechanical engineering, and electronic technology have enabled the realization of high-performance piezoelectric devices and systems in a variety of formats for a wide range of applications, such as healthcare monitoring, non-destructive testing, energy harvesting, medical sensing, and imaging. Applied piezoelectric materials include bulk ceramics, thin films, single crystals, polymers, and composites. Different types of piezoelectric materials are used in various devices, including transducers, sensors, actuators, and harvesters. The development of piezoelectric materials and devices necessitates the collaboration of researchers from various disciplines to examine their designs, modeling, structures, fabrications, characterizations, integrations, dependability, and applications. Electromechanical application innovations continue to be the driving force behind the development of new piezoelectric materials and devices. In this Special Issue, the current state of this exciting field of research will be presented, addressing a wide range of topics that include, but are not limited to, the following areas:

  • New piezoelectric materials: ceramics, thin films, single crystals, polymers, composites, and 2D materials;
  • Piezoelectric devices: sensors, actuators, transducers, energy harvesters, nanogenerators, piezotronics, flexible/stretchable devices, and integrated systems;
  • Piezoelectric device fabrications: design, modeling, simulation, manufacturing, 3D printing, characterization, packaging, and system integration;
  • Piezoelectric applications: non-destructive testing, acoustic arrays and holograms, metamaterials, energy harvesting, medical imaging, soft robotics, wearable sensors, and biomedical and healthcare applications.

Dr. Lin Zhang
Dr. Chunlong Fei
Dr. Yang Yang
Dr. Jianguo Ma
Dr. Zeyu Chen
Guest Editors

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Micromachines is an international peer-reviewed open access monthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2600 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

Keywords

  • piezoelectric sensors
  • piezoelectric actuators
  • piezoelectric transducers
  • piezoelectric energy harvesting
  • nanogenerators
  • acoustic devices
  • ultrasound imaging
  • flexible electronics
  • biosensing
  • micro- and nano-manufacturing
  • additive manufacturing
  • NDT and structure health monitoring
  • smart systems

Related Special Issue

Published Papers (4 papers)

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Research

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14 pages, 5432 KiB  
Article
Multidirectional Piezoelectric Vibration Energy Harvester Based on Cam Rotor Mechanism
by Xin Jiang, Yan Liu, Jiaming Wei, Haotian Yang, Bin Yin, Hongbo Qin and Weidong Wang
Micromachines 2023, 14(6), 1159; https://doi.org/10.3390/mi14061159 - 30 May 2023
Cited by 1 | Viewed by 1454
Abstract
The techniques that harvest mechanical energy from low-frequency, multidirectional environmental vibrations have been considered a promising strategy to implement a sustainable power source for wireless sensor networks and the Internet of Things. However, the obvious inconsistency in the output voltage and operating frequency [...] Read more.
The techniques that harvest mechanical energy from low-frequency, multidirectional environmental vibrations have been considered a promising strategy to implement a sustainable power source for wireless sensor networks and the Internet of Things. However, the obvious inconsistency in the output voltage and operating frequency among different directions may bring a hindrance to energy management. To address this issue, this paper reports a cam-rotor-based approach for a multidirectional piezoelectric vibration energy harvester. The cam rotor can transform vertical excitation into a reciprocating circular motion, producing a dynamic centrifugal acceleration to excite the piezoelectric beam. The same beam group is utilized when harvesting vertical and horizontal vibrations. Therefore, the proposed harvester reveals similar characterization in its resonant frequency and output voltage at different working directions. The structure design and modeling, device prototyping and experimental validation are conducted. The results show that the proposed harvester can produce a peak voltage of up to 42.4 V under a 0.2 g acceleration with a favorable power of 0.52 mW, and the resonant frequency for each operating direction is stable at around 3.7 Hz. Practical applications in lighting up LEDs and powering a WSN system demonstrate the promising potential of the proposed approach in capturing energy from ambient vibrations to construct self-powered engineering systems for structural health monitoring, environmental measuring, etc. Full article
(This article belongs to the Special Issue Advances in Piezoelectric Sensors, Transducers and Harvesters, 2nd Edition)
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9 pages, 4198 KiB  
Article
Ultrahigh Frequency Ultrasonic Transducers (150MHz) Based on Silicon Lenses
by Jun Chen, Chunlong Fei, Jianxin Zhao, Yi Quan, Yecheng Wang, Zhishui Jiang and Li Wen
Micromachines 2023, 14(1), 213; https://doi.org/10.3390/mi14010213 - 14 Jan 2023
Cited by 3 | Viewed by 1717
Abstract
Acoustic microscopes and acoustic tweezers have great value in the application of microparticle manipulation, biomedical research and non-destructive testing. Ultrahigh frequency (UHF) ultrasonic transducers act as the key component in acoustic microscopes, and acoustic tweezers and acoustic lenses are essential parts of UHF [...] Read more.
Acoustic microscopes and acoustic tweezers have great value in the application of microparticle manipulation, biomedical research and non-destructive testing. Ultrahigh frequency (UHF) ultrasonic transducers act as the key component in acoustic microscopes, and acoustic tweezers and acoustic lenses are essential parts of UHF ultrasonic transducers. Therefore, the preparation of acoustic lenses is crucial. Silicon is a suitable material for preparing acoustic lenses because of its high acoustic velocity, low acoustic attenuation and excellent machinability. In previous research, silicon lenses were mainly prepared by etching. However, etching has some drawbacks. The etching of large sizes is complex, time-consuming and expensive. Furthermore, vertical etching is preferred to spherical etching. Thus, a new method of ultra-precision machining was introduced to prepare silicon lenses. In this paper, silicon lenses with an aperture of 892 μm and a depth of 252 μm were prepared. Then, UHF ultrasonic transducers with a center frequency of 157 MHz and a −6-dB bandwidth of 52% were successfully prepared based on silicon lenses. The focal distance of the transducers was 736 μm and the F-number was about 0.82. The transducers had a lateral resolution of 11 μm and could distinguish the 13 μm slots on silicon wafers clearly. Full article
(This article belongs to the Special Issue Advances in Piezoelectric Sensors, Transducers and Harvesters, 2nd Edition)
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13 pages, 4398 KiB  
Article
PZT-Film-Based Piezoelectric Micromachined Ultrasonic Transducer with I-Shaped Composite Diaphragm
by Qing Yu, Guoxiang Fan, Wei Ren, Qingqing Fan, Jinming Ti, Junhong Li and Chenghao Wang
Micromachines 2022, 13(10), 1597; https://doi.org/10.3390/mi13101597 - 26 Sep 2022
Cited by 7 | Viewed by 2022
Abstract
We proposed a PZT-film-based piezoelectric micromachined ultrasonic transducer (pMUT) with an I-shaped composite diaphragm to improve the sensitivity and resonant frequency of pMUTs with the same diaphragm area. The finite element method (FEM) simulation results indicated that the pMUT with an I-shaped composite [...] Read more.
We proposed a PZT-film-based piezoelectric micromachined ultrasonic transducer (pMUT) with an I-shaped composite diaphragm to improve the sensitivity and resonant frequency of pMUTs with the same diaphragm area. The finite element method (FEM) simulation results indicated that the pMUT with an I-shaped composite diaphragm had relatively high sensitivity and resonant frequency. The pMUT with an I-shaped diaphragm had a 36.07% higher resonant frequency than a pMUT with a circular diaphragm. The pMUT with an I-shaped diaphragm had a 3.65 dB higher loop gain (loss) than a pMUT with a rectangular diaphragm. The piezoelectric layer thickness of the pMUT with an I-shaped composite diaphragm was then optimized. Maximum loop gain (loss) was reached when the piezoelectric layer thickness was 8 μm. The pMUT with an I-shaped composite diaphragm was fabricated using the MEMS method, and its performance was evaluated. Full article
(This article belongs to the Special Issue Advances in Piezoelectric Sensors, Transducers and Harvesters, 2nd Edition)
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Review

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24 pages, 6506 KiB  
Review
Recent Progress on Hydrogel-Based Piezoelectric Devices for Biomedical Applications
by Yuxuan Du, Wenya Du, Dabin Lin, Minghao Ai, Songhang Li and Lin Zhang
Micromachines 2023, 14(1), 167; https://doi.org/10.3390/mi14010167 - 09 Jan 2023
Cited by 16 | Viewed by 4853
Abstract
Flexible electronics have great potential in the application of wearable and implantable devices. Through suitable chemical alteration, hydrogels, which are three-dimensional polymeric networks, demonstrate amazing stretchability and flexibility. Hydrogel-based electronics have been widely used in wearable sensing devices because of their biomimetic structure, [...] Read more.
Flexible electronics have great potential in the application of wearable and implantable devices. Through suitable chemical alteration, hydrogels, which are three-dimensional polymeric networks, demonstrate amazing stretchability and flexibility. Hydrogel-based electronics have been widely used in wearable sensing devices because of their biomimetic structure, biocompatibility, and stimuli-responsive electrical properties. Recently, hydrogel-based piezoelectric devices have attracted intensive attention because of the combination of their unique piezoelectric performance and conductive hydrogel configuration. This mini review is to give a summary of this exciting topic with a new insight into the design and strategy of hydrogel-based piezoelectric devices. We first briefly review the representative synthesis methods and strategies of hydrogels. Subsequently, this review provides several promising biomedical applications, such as bio-signal sensing, energy harvesting, wound healing, and ultrasonic stimulation. In the end, we also provide a personal perspective on the future strategies and address the remaining challenges on hydrogel-based piezoelectric electronics. Full article
(This article belongs to the Special Issue Advances in Piezoelectric Sensors, Transducers and Harvesters, 2nd Edition)
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