Micro-Nano Science and Engineering

A special issue of Micromachines (ISSN 2072-666X).

Deadline for manuscript submissions: closed (31 March 2021) | Viewed by 58502

Special Issue Editors

School of Physics and Technology, Wuhan University, Wuhan 430072, China
Interests: information optics; optical chip system integration and microfluidics; optofluidic devices; biosensors; on-chip biochemical sensing and environmental detection
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Guest Editor
Department of Optical Science and Engineering, Fudan University, Shanghai 200433, China
Interests: photonic crystal fibers devices; advanced optical fiber manufacturing technology; fiber-based optofluidics; fiber sensors; all-fiber devices and laser technology
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Guest Editor
Laboratoire de Photonique Quantique et Moléculaire, UMR 8537, Ecole Normale Supérieure Paris Saclay, CentraleSupélec, CNRS, Université Paris-Saclay, 61 avenue du Président Wilson, 94235 Cachan, France
Interests: physics; microfluidics; mathematics

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Guest Editor
State Key Laboratory on Tunable laser Technology, Ministry of Industry and Information Technology Key Lab of Micro‐Nano Optoelectronic Information System, Shenzhen Graduate School, Harbin Institute of Technology, Shenzhen 518055, China
Interests: nanophotonics; optical metamaterials; plasma materials

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Department of Applied Physics, The Hong Kong Polytechnic University, Hong Kong 999077, China
Interests: microfluidics; optofluidics; biomimetics; photocatalysis; plasmonics
Special Issues, Collections and Topics in MDPI journals

Special Issue Information

Dear Colleagues,

The persistence of COVID-19 continues to wreak havoc on our global research community; many researchers are having a hard time to make the deliveries on schedule, including research publications. To support our research community and to serve the surging needs for rapid publication, we are now organizing this Special Issue as a fast lane to publish papers within 30 days. The papers will still go through a rigorous peer-review process to ensure a high scientific quality, but we will expedite the whole process and make decisions quickly.

Micromachines is a peer-reviewed open access journal on all aspects of micro/nano-scaled structures, materials, devices, systems as well as related micro- and nanotechnology from fundamentals to applications. Its Impact Factor has increased continuously in recent years and reached 2.523 in 2019. Its primary areas of research interests include, but are not limited to, the following:

  • Micro-/nano-scale structures, devices, systems, and applications;
  • Micro- and nano-technologies for biological, chemical, medical, environmental, and energy applications;
  • Micro- and nano-scale fabrication and manufacturing technologies;
  • Theories and analyses of multiphysics phenomena in micro-/nano-scale;
  • Material developments for micro- and nano-structures.

All scholars in the communities of micro-/nano-sciences and technologies are invited to submit original research articles, reviews, perspectives, letters, and communications on any related topics.

Dr. Yi Zhang
Prof. Dr. Xuming Zhang
Prof. Dr. Limin Xiao
Prof. Dr. Yi Yang
Prof. Dr. Shumin Xiao
Dr. Abdel I. El Abed
Guest Editors

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Micromachines is an international peer-reviewed open access monthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2600 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

Published Papers (19 papers)

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14 pages, 5391 KiB  
Article
A Novel SimpleDrop Chip for 3D Spheroid Formation and Anti-Cancer Drug Assay
by Xiaoli Liu, Huichao Lin, Jiaao Song, Taiyi Zhang, Xiaoying Wang, Xiaowen Huang and Chengyun Zheng
Micromachines 2021, 12(6), 681; https://doi.org/10.3390/mi12060681 - 10 Jun 2021
Cited by 17 | Viewed by 4328
Abstract
Cell culture is important for the rapid screening of anti-cancer drug candidates, attracting intense interest. Traditional 2D cell culture has been widely utilized in cancer biological research. However, 3D cellular spheroids are able to recapitulate the in vivo microenvironment of tissues or tumors. [...] Read more.
Cell culture is important for the rapid screening of anti-cancer drug candidates, attracting intense interest. Traditional 2D cell culture has been widely utilized in cancer biological research. However, 3D cellular spheroids are able to recapitulate the in vivo microenvironment of tissues or tumors. Thus far, several 3D cell culture methods have been developed, for instance, the hanging drop method, spinner flasks and micropatterned plates. Nevertheless, these methods have been reported to have some disadvantages, for example, medium replacement is inconvenient or causes cellular damage. Here, we report on an easy-to-operate and useful micro-hole culture chip (SimpleDrop) for 3D cellular spheroid formation and culture and drug analysis, which has advantages over the traditional method in terms of its ease of operation, lack of shear force and environmentally friendliness. On this chip, we observed the formation of a 3D spheroid clearly. Three drugs (paclitaxel, cisplatin and methotrexate) were tested by both cell viability assay and drug-induced apoptotic assay. The results show that the three drugs present a similar conclusion: cell viability decreased over time and concentration. Moreover, the apoptotic experiment showed a similar trend to the live/dead cell assay, in that the fraction of the apoptotic and necrotic cells correlated with the concentration and time. All these results prove that our SimpleDrop method is a useful and easy method for the formation of 3D cellular spheroids, which shows its potential for both cell–cell interaction research, tissue engineering and anticancer drug screening. Full article
(This article belongs to the Special Issue Micro-Nano Science and Engineering)
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18 pages, 3381 KiB  
Article
Identification and Speed Estimation of a Moving Object in an Indoor Application Based on Visible Light Sensing of Retroreflective Foils
by Andreas Peter Weiss and Franz Peter Wenzl
Micromachines 2021, 12(4), 439; https://doi.org/10.3390/mi12040439 - 15 Apr 2021
Cited by 9 | Viewed by 1905
Abstract
Identification and sensing are two of the main tasks a wireless sensor node has to perform in an Internet of Things (IoT) environment. Placing active powered nodes on objects is the most usual approach for the fulfillment of these functions. With the expected [...] Read more.
Identification and sensing are two of the main tasks a wireless sensor node has to perform in an Internet of Things (IoT) environment. Placing active powered nodes on objects is the most usual approach for the fulfillment of these functions. With the expected massive increase of connected things, there are several issues on the horizon that hamper the further deployment of this approach in an energy efficient, sustainable way, like the usage of environmentally hazardous batteries or accumulators, as well as the required electrical energy for their operation. In this work, we propose a novel approach for performing the tasks of identification and sensing, applying visible light sensing (VLS) based on light emitting diode (LED) illumination and utilizing retroreflective foils mounted on a moving object. This low cost hardware is combined with a self-developed, low complex software algorithm with minimal training effort. Our results show that successful identification and sensing of the speed of a moving object can be achieved with a correct estimation rate of 99.92%. The used foils are commercially available and pose no threat to the environment and there is no need for active sensors on the moving object and no requirement of wireless radio frequency communication. All of this is achievable whilst undisturbed illumination is still provided. Full article
(This article belongs to the Special Issue Micro-Nano Science and Engineering)
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11 pages, 2323 KiB  
Article
Biosensing Near the Exceptional Point Based on Resonant Optical Tunneling Effect
by Yang Liu, Pengyun Yan, Feng Liu, Aoqun Jian and Shengbo Sang
Micromachines 2021, 12(4), 426; https://doi.org/10.3390/mi12040426 - 14 Apr 2021
Cited by 5 | Viewed by 1838
Abstract
Inspired by exceptional point (EP) sensing in non-Hermitian systems, in this work, a label-free biosensor for detecting low-concentration analytes is proposed, via a special multilayer structure: a resonant optical tunneling resonator. Due to the square root topology near the exceptional point, a recognized [...] Read more.
Inspired by exceptional point (EP) sensing in non-Hermitian systems, in this work, a label-free biosensor for detecting low-concentration analytes is proposed, via a special multilayer structure: a resonant optical tunneling resonator. Due to the square root topology near the exceptional point, a recognized target analyte perturbs the system deviated from the exceptional point, leading to resolvable modes splitting in the transmission spectrum. The performance of the designed sensor is analyzed by the coupled-mode theory and transfer matrix method, separately. Here, the simulation results demonstrate that the obtained sensitivity is 17,120 nm/imaginary part unit of refractive index (IP) and the theoretical detection limit is 4.2 × 10−8 IP (regarding carcinoembryonic antigen (CEA), the minimum detection value is 1.78 ng). Instead of the typical diffusion manner, the liquid sample is loaded by convection, which can considerably improve the efficiency of sample capture and shorten the response time of the sensor. The sketched sensor may find potential application in the fields of biomedical detection, environment protection, and drinking water safety. Full article
(This article belongs to the Special Issue Micro-Nano Science and Engineering)
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7 pages, 15326 KiB  
Article
Directional and Fast Photoluminescence from CsPbI3 Nanocrystals Coupled to Dielectric Circular Bragg Gratings
by Yan Hua, Yuming Wei, Bo Chen, Zhuojun Liu, Zhe He, Zeyu Xing, Shunfa Liu, Peinian Huang, Yan Chen, Yunan Gao and Jin Liu
Micromachines 2021, 12(4), 422; https://doi.org/10.3390/mi12040422 - 13 Apr 2021
Cited by 3 | Viewed by 2244
Abstract
Lead halide perovskite nanocrystals (NCs), especially the all-inorganic perovskite NCs, have drawn substantial attention for both fundamental research and device applications in recent years due to their unique optoelectronic properties. To build high-performance nanophotonic devices based on perovskite NCs, it is highly desirable [...] Read more.
Lead halide perovskite nanocrystals (NCs), especially the all-inorganic perovskite NCs, have drawn substantial attention for both fundamental research and device applications in recent years due to their unique optoelectronic properties. To build high-performance nanophotonic devices based on perovskite NCs, it is highly desirable to couple the NCs to photonic nanostructures for enhancing the radiative emission rate and improving the emission directionality of the NCs. In this work, we synthesized high-quality CsPbI3 NCs and further coupled them to dielectric circular Bragg gratings (CBGs). The efficient couplings between the perovskite NCs and the CBGs resulted in a 45.9-fold enhancement of the photoluminescence (PL) intensity and 3.2-fold acceleration of the radiative emission rate. Our work serves as an important step for building high-performance nanophotonic light emitting devices by integrating perovskite NCs with photonic nanostructures. Full article
(This article belongs to the Special Issue Micro-Nano Science and Engineering)
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17 pages, 5886 KiB  
Article
A Battery-Less Wireless Respiratory Sensor Using Micro-Machined Thin-Film Piezoelectric Resonators
by Sina Moradian, Parvin Akhkandi, Junyi Huang, Xun Gong and Reza Abdolvand
Micromachines 2021, 12(4), 363; https://doi.org/10.3390/mi12040363 - 27 Mar 2021
Cited by 8 | Viewed by 2399
Abstract
In this work, we present a battery-less wireless Micro-Electro-Mechanical (MEMS)-based respiration sensor capable of measuring the respiration profile of a human subject from up to 2 m distance from the transceiver unit for a mean excitation power of 80 µW and a measured [...] Read more.
In this work, we present a battery-less wireless Micro-Electro-Mechanical (MEMS)-based respiration sensor capable of measuring the respiration profile of a human subject from up to 2 m distance from the transceiver unit for a mean excitation power of 80 µW and a measured SNR of 124.8 dB at 0.5 m measurement distance. The sensor with a footprint of ~10 cm2 is designed to be inexpensive, maximize user mobility, and cater to applications where disposability is desirable to minimize the sanitation burden. The sensing system is composed of a custom UHF RFID antenna, a low-loss piezoelectric MEMS resonator with two modes within the frequency range of interest, and a base transceiver unit. The difference in temperature and moisture content of inhaled and exhaled air modulates the resonance frequency of the MEMS resonator which in turn is used to monitor respiration. To detect changes in the resonance frequency of the MEMS devices, the sensor is excited by a pulsed sinusoidal signal received through an external antenna directly coupled to the device. The signal reflected from the device through the antenna is then analyzed via Fast Fourier Transform (FFT) to extract and monitor the resonance frequency of the resonator. By tracking the resonance frequency over time, the respiration profile of a patient is tracked. A compensation method for the removal of motion-induced artifacts and drift is proposed and implemented using the difference in the resonance frequency of two resonance modes of the same resonator. Full article
(This article belongs to the Special Issue Micro-Nano Science and Engineering)
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7 pages, 1860 KiB  
Article
In-Fiber BaTiO3 Microsphere Resonator for High-Sensitivity Temperature Measurement
by Chi Li, Meng Zhu, Peng Ji, Cong Xiong and Changrui Liao
Micromachines 2021, 12(3), 318; https://doi.org/10.3390/mi12030318 - 18 Mar 2021
Cited by 4 | Viewed by 2087
Abstract
A fiber optic whispering gallery mode (WGM) resonator was proposed and realized by integrating an inline polymer waveguide with a microsphere mounted on it. The polymer waveguide with a diameter of 1 μm was printed with femtosecond laser-assisted multiphoton polymerization in a section [...] Read more.
A fiber optic whispering gallery mode (WGM) resonator was proposed and realized by integrating an inline polymer waveguide with a microsphere mounted on it. The polymer waveguide with a diameter of 1 μm was printed with femtosecond laser-assisted multiphoton polymerization in a section of a grooved hollow-core fiber, which was sandwiched between two single-mode fibers. Two WGW resonators assembled with microspheres of different sizes were prepared. The transmission spectra of those stimulated WGMs were investigated both in simulation and experimentally. The temperature response of the resonators was particularly studied, and a linear sensitivity of −593 pm/°C was achieved from 20 °C to 100 °C. Full article
(This article belongs to the Special Issue Micro-Nano Science and Engineering)
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18 pages, 5765 KiB  
Article
Emulating Artificial Synaptic Plasticity Characteristics from SiO2-Based Conductive Bridge Memories with Pt Nanoparticles
by Panagiotis Bousoulas, Charalampos Papakonstantinopoulos, Stavros Kitsios, Konstantinos Moustakas, Georgios Ch. Sirakoulis and Dimitris Tsoukalas
Micromachines 2021, 12(3), 306; https://doi.org/10.3390/mi12030306 - 15 Mar 2021
Cited by 9 | Viewed by 2620
Abstract
The quick growth of information technology has necessitated the need for developing novel electronic devices capable of performing novel neuromorphic computations with low power consumption and a high degree of accuracy. In order to achieve this goal, it is of vital importance to [...] Read more.
The quick growth of information technology has necessitated the need for developing novel electronic devices capable of performing novel neuromorphic computations with low power consumption and a high degree of accuracy. In order to achieve this goal, it is of vital importance to devise artificial neural networks with inherent capabilities of emulating various synaptic properties that play a key role in the learning procedures. Along these lines, we report here the direct impact of a dense layer of Pt nanoparticles that plays the role of the bottom electrode, on the manifestation of the bipolar switching effect within SiO2-based conductive bridge memories. Valuable insights regarding the influence of the thermal conductivity value of the bottom electrode on the conducting filament growth mechanism are provided through the application of a numerical model. The implementation of an intermediate switching transition slope during the SET transition permits the emulation of various artificial synaptic functionalities, such as short-term plasticity, including paired-pulsed facilitation and paired-pulse depression, long-term plasticity and four different types of spike-dependent plasticity. Our approach provides valuable insights toward the development of multifunctional synaptic elements that operate with low power consumption and exhibit biological-like behavior. Full article
(This article belongs to the Special Issue Micro-Nano Science and Engineering)
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11 pages, 5388 KiB  
Article
High-Throughput Cell Trapping in the Dentate Spiral Microfluidic Channel
by Jiawei Lu, Bo Dai, Kan Wang, Yan Long, Zhuoqing Yang, Junyi Chen, Shaoqi Huang, Lulu Zheng, Yongfeng Fu, Wenbin Wan, Songlin Zhuang, Yangtai Guan and Dawei Zhang
Micromachines 2021, 12(3), 288; https://doi.org/10.3390/mi12030288 - 09 Mar 2021
Cited by 1 | Viewed by 2438
Abstract
Cell trapping is a very useful technique in a variety of cell-based assays and cellular research fields. It requires a high-throughput, high-efficiency operation to isolate cells of interest and immobilize the captured cells at specific positions. In this study, a dentate spiral microfluidic [...] Read more.
Cell trapping is a very useful technique in a variety of cell-based assays and cellular research fields. It requires a high-throughput, high-efficiency operation to isolate cells of interest and immobilize the captured cells at specific positions. In this study, a dentate spiral microfluidic structure is proposed for cell trapping. The structure consists of a main spiral channel connecting an inlet and an out and a large number of dentate traps on the side of the channel. The density of the traps is high. When a cell comes across an empty trap, the cell suddenly makes a turn and enters the trap. Once the trap captures enough cells, the trap becomes closed and the following cells pass by the trap. The microfluidic structure is optimized based on the investigation of the influence over the flow. In the demonstration, 4T1 mouse breast cancer cells injected into the chip can be efficiently captured and isolated in the different traps. The cell trapping operates at a very high flow rate (40 μL/s) and a high trapping efficiency (>90%) can be achieved. The proposed high-throughput cell-trapping technique can be adopted in the many applications, including rapid microfluidic cell-based assays and isolation of rare circulating tumor cells from a large volume of blood sample. Full article
(This article belongs to the Special Issue Micro-Nano Science and Engineering)
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12 pages, 3163 KiB  
Article
A Phosphorescence Quenching-Based Intelligent Dissolved Oxygen Sensor on an Optofluidic Platform
by Fang Wang, Longfei Chen, Jiaomeng Zhu, Xuejia Hu and Yi Yang
Micromachines 2021, 12(3), 281; https://doi.org/10.3390/mi12030281 - 08 Mar 2021
Cited by 10 | Viewed by 2794
Abstract
Continuous measurement of dissolved oxygen (DO) is essential for water quality monitoring and biomedical applications. Here, a phosphorescence quenching-based intelligent dissolved oxygen sensor on an optofluidic platform for continuous measurement of dissolved oxygen is presented. A high sensitivity dissolved oxygen-sensing membrane was prepared [...] Read more.
Continuous measurement of dissolved oxygen (DO) is essential for water quality monitoring and biomedical applications. Here, a phosphorescence quenching-based intelligent dissolved oxygen sensor on an optofluidic platform for continuous measurement of dissolved oxygen is presented. A high sensitivity dissolved oxygen-sensing membrane was prepared by coating the phosphorescence indicator of platinum(II) meso-tetrakis(pentafluorophenyl)porphyrin (PtTFPP) on the surface of the microfluidic channels composed of polydimethylsiloxane (PDMS) microstructure arrays. Then, oxygen could be determined by its quenching effect on the phosphorescence, according to Stern–Volmer model. The intelligent sensor abandons complicated optical or electrical design and uses a photomultiplier (PMT) counter in cooperation with a mobile phone application program to measure phosphorescence intensity, so as to realize continuous, intelligent and real-time dissolved oxygen analysis. Owing to the combination of the microfluidic-based highly sensitive oxygen sensing membrane with a reliable phosphorescent intensity detection module, the intelligent sensor achieves a low limit of detection (LOD) of 0.01 mg/L, a high sensitivity of 16.9 and a short response time (22 s). Different natural water samples were successfully analyzed using the intelligent sensor, and results demonstrated that the sensor features a high accuracy. The sensor combines the oxygen sensing mechanism with optofluidics and electronics, providing a miniaturized and intelligent detection platform for practical oxygen analysis in different application fields. Full article
(This article belongs to the Special Issue Micro-Nano Science and Engineering)
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12 pages, 3774 KiB  
Article
Interfacial Tension Measurements in Microfluidic Quasi-Static Extensional Flows
by Doojin Lee and Amy Q. Shen
Micromachines 2021, 12(3), 272; https://doi.org/10.3390/mi12030272 - 06 Mar 2021
Cited by 6 | Viewed by 2155
Abstract
Droplet microfluidics provides a versatile tool for measuring interfacial tensions between two immiscible fluids owing to its abilities of fast response, enhanced throughput, portability and easy manipulations of fluid compositions, comparing to conventional techniques. Purely homogeneous extension in the microfluidic device is desirable [...] Read more.
Droplet microfluidics provides a versatile tool for measuring interfacial tensions between two immiscible fluids owing to its abilities of fast response, enhanced throughput, portability and easy manipulations of fluid compositions, comparing to conventional techniques. Purely homogeneous extension in the microfluidic device is desirable to measure the interfacial tension because the flow field enables symmetric droplet deformation along the outflow direction. To do so, we designed a microfluidic device consisting of a droplet production region to first generate emulsion droplets at a flow-focusing area. The droplets are then trapped at a stagnation point in the cross junction area, subsequently being stretched along the outflow direction under the extensional flow. These droplets in the device are either confined or unconfined in the channel walls depending on the channel height, which yields different droplet deformations. To calculate the interfacial tension for confined and unconfined droplet cases, quasi-static 2D Darcy approximation model and quasi-static 3D small deformation model are used. For the confined droplet case under the extensional flow, an effective viscosity of the two immiscible fluids, accounting for the viscosity ratio of continuous and dispersed phases, captures the droplet deformation well. However, the 2D model is limited to the case where the droplet is confined in the channel walls and deforms two-dimensionally. For the unconfined droplet case, the 3D model provides more robust estimates than the 2D model. We demonstrate that both 2D and 3D models provide good interfacial tension measurements under quasi-static extensional flows in comparison with the conventional pendant drop method. Full article
(This article belongs to the Special Issue Micro-Nano Science and Engineering)
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8 pages, 14429 KiB  
Article
Dual Demodulation of Temperature and Refractive Index Using Ring Core Fiber Based Mach-Zehnder Interferometer
by Weihao Yuan and Changyuan Yu
Micromachines 2021, 12(3), 258; https://doi.org/10.3390/mi12030258 - 03 Mar 2021
Cited by 10 | Viewed by 1615
Abstract
We report the ring core fiber spliced with single mode fiber and no core fiber which is used for temperature and refractive index (RI) sensing. The Mach-Zehnder interferometer (MZI) is formed with this kind of sandwich fiber structure and the maximum extinction ratio [...] Read more.
We report the ring core fiber spliced with single mode fiber and no core fiber which is used for temperature and refractive index (RI) sensing. The Mach-Zehnder interferometer (MZI) is formed with this kind of sandwich fiber structure and the maximum extinction ratio of the interference spectra reaches 27 dB with the free spectra range of 12 nm. The MZI fiber sensor is applied for temperature sensing with the sensitivity of 69 pm/°C and 0.051 dB/°C. The RI sensitivity reaches 182.07 dB/RIU and −31.44 nm/RIU with the RI ranging from 1.33 to 1.38. The RI value can be directly demodulated with the interference dip intensity which shows insensitivity to temperature. The demodulation of temperature can be achieved by using the linear equations between dip wavelength shift with the variation of temperature and RI. Full article
(This article belongs to the Special Issue Micro-Nano Science and Engineering)
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11 pages, 3226 KiB  
Article
Endless Single-Mode Photonics Crystal Fiber Metalens for Broadband and Efficient Focusing in Near-Infrared Range
by Qiancheng Zhao, Jiaqi Qu, Gangding Peng and Changyuan Yu
Micromachines 2021, 12(2), 219; https://doi.org/10.3390/mi12020219 - 21 Feb 2021
Cited by 9 | Viewed by 3234
Abstract
The advent of the ‘lab-on-fiber’ concept has boosted the prosperity of optical fiber-based platforms integrated with nanostructured metasurface technology which are capable of controlling the light at the nanoscale for multifunctional applications. Here, we propose an endless single-mode large-mode-area photonic crystal fiber (LMA-PCF) [...] Read more.
The advent of the ‘lab-on-fiber’ concept has boosted the prosperity of optical fiber-based platforms integrated with nanostructured metasurface technology which are capable of controlling the light at the nanoscale for multifunctional applications. Here, we propose an endless single-mode large-mode-area photonic crystal fiber (LMA-PCF) integrated metalens for broadband and efficient focusing from 800 to 1550 nm. In the present work, the optical properties of the substrate LMA-PCF were investigated, and the metalens, consisting of dielectric TiO2 nanorods with varying radii, was elaborately designed in the fiber core region with a diameter of 48 μm to cover the required phase profile for efficient focusing with a high transmission. The focusing characteristics of the designed metalens were also investigated in detail over a wide wavelength range. It is shown that the in-fiber metalens is capable of converging the incident beams into the bright, symmetric, and legible focal spots with a large focal length of 315–380 μm depending on the operating wavelength. A high and average focusing efficiency of 70% was also obtained with varying wavelengths. It is believed the proposed fiber metalens may show great potential in applications including fiber laser configuration, machining, and fiber communication. Full article
(This article belongs to the Special Issue Micro-Nano Science and Engineering)
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11 pages, 2818 KiB  
Article
SARS-CoV-2 RNA Detection with Duplex-Specific Nuclease Signal Amplification
by Meiqing Liu, Haoran Li, Yanwei Jia, Pui-In Mak and Rui P. Martins
Micromachines 2021, 12(2), 197; https://doi.org/10.3390/mi12020197 - 14 Feb 2021
Cited by 8 | Viewed by 2918
Abstract
The emergence of the novel severe acute respiratory syndrome coronavirus 2 (SARS-CoV-2), a zoonotic pathogen, has led to the outbreak of coronavirus disease 2019 (COVID-19) pandemic and brought serious threats to public health worldwide. The gold standard method for SARS-CoV-2 detection requires both [...] Read more.
The emergence of the novel severe acute respiratory syndrome coronavirus 2 (SARS-CoV-2), a zoonotic pathogen, has led to the outbreak of coronavirus disease 2019 (COVID-19) pandemic and brought serious threats to public health worldwide. The gold standard method for SARS-CoV-2 detection requires both reverse transcription (RT) of the virus RNA to cDNA and then polymerase chain reaction (PCR) for the cDNA amplification, which involves multiple enzymes, multiple reactions and a complicated assay optimization process. Here, we developed a duplex-specific nuclease (DSN)-based signal amplification method for SARS-CoV-2 detection directly from the virus RNA utilizing two specific DNA probes. These specific DNA probes can hybridize to the target RNA at different locations in the nucleocapsid protein gene (N gene) of SARS-CoV-2 to form a DNA/RNA heteroduplex. DSN cleaves the DNA probe to release fluorescence, while leaving the RNA strand intact to be bound to another available probe molecule for further cleavage and fluorescent signal amplification. The optimized DSN amount, incubation temperature and incubation time were investigated in this work. Proof-of-principle SARS-CoV-2 detection was demonstrated with a detection sensitivity of 500 pM virus RNA. This simple, rapid, and direct RNA detection method is expected to provide a complementary method for the detection of viruses mutated at the PCR primer-binding regions for a more precise detection. Full article
(This article belongs to the Special Issue Micro-Nano Science and Engineering)
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11 pages, 4022 KiB  
Article
Numerical and Experimental Investigation on the Optical Manipulation from an Axicon Lensed Fiber
by Wu Zhang, Yanxiao Lin, Yusong Gao, Zekai Guo, Xiangling Li, Yuhong Hu, Pengcai Dong, Qifan Zhang, Xiaohui Fang and Meng Zhang
Micromachines 2021, 12(2), 187; https://doi.org/10.3390/mi12020187 - 12 Feb 2021
Viewed by 1933
Abstract
Here we numerically and experimentally studied the optical trapping on a microsphere from an axicon lensed fiber (ALF). The optical force from the fiber with different tapered lengths and by incident light at different wavelengths is calculated. Numerically, the microsphere can be trapped [...] Read more.
Here we numerically and experimentally studied the optical trapping on a microsphere from an axicon lensed fiber (ALF). The optical force from the fiber with different tapered lengths and by incident light at different wavelengths is calculated. Numerically, the microsphere can be trapped by the fiber with tapered outline y=±x/0.5 and y=±x at a short incident wavelength of 900 nm. While for the fiber with tapered outline y=±x/2, the microsphere can be trapped by the light with longer wavelength of 1100 nm, 1300 nm, or 1500 nm. The optical trapping to a polystyrene microsphere is experimentally demonstrated in a microfluidic channel and the corresponding optical force is derived according to the fluid flow speed. This study can provide a guidance for future tapered fibre design for optical trapping to microspheres. Full article
(This article belongs to the Special Issue Micro-Nano Science and Engineering)
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14 pages, 4194 KiB  
Article
Investigation on Microparticle Transport and Deposition Mechanics in Rhythmically Expanding Alveolar Chip
by Jun Dong, Yan Qiu, Huimin Lv, Yue Yang and Yonggang Zhu
Micromachines 2021, 12(2), 184; https://doi.org/10.3390/mi12020184 - 12 Feb 2021
Cited by 11 | Viewed by 1698
Abstract
The transport and deposition of micro/nanoparticles in the lungs under respiration has an important impact on human health. Here, we presented a real-scale alveolar chip with movable alveolar walls based on the microfluidics to experimentally study particle transport in human lung alveoli under [...] Read more.
The transport and deposition of micro/nanoparticles in the lungs under respiration has an important impact on human health. Here, we presented a real-scale alveolar chip with movable alveolar walls based on the microfluidics to experimentally study particle transport in human lung alveoli under rhythmical respiratory. A new method of mixing particles in aqueous solution, instead of air, was proposed for visualization of particle transport in the alveoli. Our novel design can track the particle trajectories under different force conditions for multiple periods. The method proposed in this study gives us better resolution and clearer images without losing any details when mapping the particle velocities. More detailed particle trajectories under multiple forces with different directions in an alveolus are presented. The effects of flow patterns, drag force, gravity and gravity directions are evaluated. By tracing the particle trajectories in the alveoli, we find that the drag force contributes to the reversible motion of particles. However, compared to drag force, the gravity is the decisive factor for particle deposition in the alveoli. Full article
(This article belongs to the Special Issue Micro-Nano Science and Engineering)
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10 pages, 3212 KiB  
Article
Ultrafast Parallel Micro-Gap Resistance Welding of an AuNi9 Microwire and Au Microlayer
by He Zhang, Shang Wang, Bingying Wu, Weiwei Zhang, Chunjin Hang and Yanhong Tian
Micromachines 2021, 12(1), 51; https://doi.org/10.3390/mi12010051 - 03 Jan 2021
Cited by 9 | Viewed by 2306
Abstract
Welding between an AuNi9 microwire and Au microlayer is of great importance for fabricating electrical contact structures for high precision inertial devices, satellite slip ring brushes, robots, etc. In this paper, the achievement of parallel micro-gap resistance welding (PMRW) with 200-μm AuNi [...] Read more.
Welding between an AuNi9 microwire and Au microlayer is of great importance for fabricating electrical contact structures for high precision inertial devices, satellite slip ring brushes, robots, etc. In this paper, the achievement of parallel micro-gap resistance welding (PMRW) with 200-μm AuNi9 microwires on a 3-μm Au layer was presented. The study on the orthogonal design of the experiment was carried out. The effect of the process parameters (welding current, welding time, and welding pressure) was discussed in reference to the morphologies and tensile force of the joint using range analysis. It is shown that too much or too little heat input will decrease the welding performance. A group of optimized process parameters (0.275 kA welding current, 3 ms welding time, and 28.7 N welding pressure) was obtained. During the welding process, the dynamic resistance of the whole welding system was measured, which can reflect the welding quality. Finite element simulation is utilized to calculate the welding temperature. The highest temperature was located in the center area of the AuNi9 microwire, reaching 1397.2 °C, which is higher than the melting point of AuNi9. By contrast, the highest temperature for the pad was 826.47 °C (lower than the melting point of Au). Hence, under optimized process parameters, a transient interfacial reaction between the liquid AuNi9 microwire and solid Au pad occurred, and the strength of the welded joint reached 5.54 N. Full article
(This article belongs to the Special Issue Micro-Nano Science and Engineering)
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Review

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56 pages, 23009 KiB  
Review
Recent Advances and Challenges of Nanomaterials-Based Hydrogen Sensors
by Bei Wang, Ling Sun, Martin Schneider-Ramelow, Klaus-Dieter Lang and Ha-Duong Ngo
Micromachines 2021, 12(11), 1429; https://doi.org/10.3390/mi12111429 - 21 Nov 2021
Cited by 14 | Viewed by 4218
Abstract
Safety is a crucial issue in hydrogen energy applications due to the unique properties of hydrogen. Accordingly, a suitable hydrogen sensor for leakage detection must have at least high sensitivity and selectivity, rapid response/recovery, low power consumption and stable functionality, which requires further [...] Read more.
Safety is a crucial issue in hydrogen energy applications due to the unique properties of hydrogen. Accordingly, a suitable hydrogen sensor for leakage detection must have at least high sensitivity and selectivity, rapid response/recovery, low power consumption and stable functionality, which requires further improvements on the available hydrogen sensors. In recent years, the mature development of nanomaterials engineering technologies, which facilitate the synthesis and modification of various materials, has opened up many possibilities for improving hydrogen sensing performance. Current research of hydrogen detection sensors based on both conservational and innovative materials are introduced in this review. This work mainly focuses on three material categories, i.e., transition metals, metal oxide semiconductors, and graphene and its derivatives. Different hydrogen sensing mechanisms, such as resistive, capacitive, optical and surface acoustic wave-based sensors, are also presented, and their sensing performances and influence based on different nanostructures and material combinations are compared and discussed, respectively. This review is concluded with a brief outlook and future development trends. Full article
(This article belongs to the Special Issue Micro-Nano Science and Engineering)
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28 pages, 7218 KiB  
Review
Heterogeneous Wafer Bonding Technology and Thin-Film Transfer Technology-Enabling Platform for the Next Generation Applications beyond 5G
by Zhihao Ren, Jikai Xu, Xianhao Le and Chengkuo Lee
Micromachines 2021, 12(8), 946; https://doi.org/10.3390/mi12080946 - 11 Aug 2021
Cited by 41 | Viewed by 8818
Abstract
Wafer bonding technology is one of the most effective methods for high-quality thin-film transfer onto different substrates combined with ion implantation processes, laser irradiation, and the removal of the sacrificial layers. In this review, we systematically summarize and introduce applications of the thin [...] Read more.
Wafer bonding technology is one of the most effective methods for high-quality thin-film transfer onto different substrates combined with ion implantation processes, laser irradiation, and the removal of the sacrificial layers. In this review, we systematically summarize and introduce applications of the thin films obtained by wafer bonding technology in the fields of electronics, optical devices, on-chip integrated mid-infrared sensors, and wearable sensors. The fabrication of silicon-on-insulator (SOI) wafers based on the Smart CutTM process, heterogeneous integrations of wide-bandgap semiconductors, infrared materials, and electro-optical crystals via wafer bonding technology for thin-film transfer are orderly presented. Furthermore, device design and fabrication progress based on the platforms mentioned above is highlighted in this work. They demonstrate that the transferred films can satisfy high-performance power electronics, molecular sensors, and high-speed modulators for the next generation applications beyond 5G. Moreover, flexible composite structures prepared by the wafer bonding and de-bonding methods towards wearable electronics are reported. Finally, the outlooks and conclusions about the further development of heterogeneous structures that need to be achieved by the wafer bonding technology are discussed. Full article
(This article belongs to the Special Issue Micro-Nano Science and Engineering)
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20 pages, 6782 KiB  
Review
Microfluidics-Based Plasmonic Biosensing System Based on Patterned Plasmonic Nanostructure Arrays
by Yanting Liu and Xuming Zhang
Micromachines 2021, 12(7), 826; https://doi.org/10.3390/mi12070826 - 14 Jul 2021
Cited by 33 | Viewed by 5285
Abstract
This review aims to summarize the recent advances and progress of plasmonic biosensors based on patterned plasmonic nanostructure arrays that are integrated with microfluidic chips for various biomedical detection applications. The plasmonic biosensors have made rapid progress in miniaturization sensors with greatly enhanced [...] Read more.
This review aims to summarize the recent advances and progress of plasmonic biosensors based on patterned plasmonic nanostructure arrays that are integrated with microfluidic chips for various biomedical detection applications. The plasmonic biosensors have made rapid progress in miniaturization sensors with greatly enhanced performance through the continuous advances in plasmon resonance techniques such as surface plasmon resonance (SPR) and localized SPR (LSPR)-based refractive index sensing, SPR imaging (SPRi), and surface-enhanced Raman scattering (SERS). Meanwhile, microfluidic integration promotes multiplexing opportunities for the plasmonic biosensors in the simultaneous detection of multiple analytes. Particularly, different types of microfluidic-integrated plasmonic biosensor systems based on versatile patterned plasmonic nanostructured arrays were reviewed comprehensively, including their methods and relevant typical works. The microfluidics-based plasmonic biosensors provide a high-throughput platform for the biochemical molecular analysis with the advantages such as ultra-high sensitivity, label-free, and real time performance; thus, they continue to benefit the existing and emerging applications of biomedical studies, chemical analyses, and point-of-care diagnostics. Full article
(This article belongs to the Special Issue Micro-Nano Science and Engineering)
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