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Micromachines
Special Issues
MEMS Sensors: Past, Present and Future
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MEMS Sensors: Past, Present and Future

A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "A：Physics".

Deadline for manuscript submissions: closed (28 February 2024) | Viewed by 8193

Special Issue Editors

Prof. Dr. Liangcheng Tu

E-Mail Website
Guest Editor
TianQin Research Center for Gravitational Physics and School of Physics and Astronomy, Sun Yat-sen University, Zhuhai 519082, China
Interests: MEMS; micro-sensors; micro-actuators; micromachined design and optimization; advanced microfabricationtechniques; detecting and conditioning circuits
Dr. Wenjie Wu

E-Mail Website
Guest Editor
MOE Key Laboratory of Fundamental Physical Quantities Measurement & Hubei Key Laboratory of Gravitation and Quantum Physics, PGMF and School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China
Interests: MEMS; sensors; MEMS accelerometer; MEMS gravimeter; structure design; micromachining technology

Special Issue Information

Dear Colleagues,

Alongside the rapid development of sensing and manufacturing technologies, numerous novel MEMS sensors have emerged with a broad range of applications, including automotive electronics, consumer electronics, intelligent plants, medical treatments, and geophysical applications. These sensors include accelerometers, gyroscopes, hydrophones, pressure sensors, strain gauges, flow sensors, gas sensors, thermometers, and sensors for special applications, such as ultra-high-precision sensors for geophysical applications and sensors working under extreme conditions of shock, temperature, humidity, and chemical exposure. Their performances are determined by sensing mechanisms, structural design, fabrication techniques, detecting circuits and working environments, etc., and can be optimized by means of theoretical analysis, simulation, and calibration.

This Special Issue seeks to showcase research papers and review articles discussing novel sensing mechanisms, design, fabrication, detecting circuits, calibration methods, and applications of MEMS sensors. Areas of interest include, but are not limited to:

  • Sensing mechanisms
  • Structural design
  • System modeling and simulation
  • Advanced fabrication techniques
  • Detecting circuits
  • Reliability of sensors
  • Calibration methods
  • New applications

Prof. Dr. Liangcheng Tu
Dr. Wenjie Wu
Guest Editors

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Micromachines is an international peer-reviewed open access monthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2600 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

Keywords

  • MEMS
  • sensors
  • design
  • fabrication
  • calibration
  • sensing mechanism

Published Papers (5 papers)

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Research

19 pages, 87789 KiB  
Communication
Research on IMU-Assisted UWB-Based Positioning Algorithm in Underground Coal Mines
by Lei Wang, Shangqi Zhang, Junyan Qi, Hongren Chen and Ruifu Yuan
Micromachines 2023, 14(7), 1481; https://doi.org/10.3390/mi14071481 - 24 Jul 2023
Viewed by 1064
Abstract
The application of an ultra-wideband (UWB) positioning system in a Global Positioning System (GPS) denial environment such as an underground coal mine, mainly focuses on position information and rarely involves information such as direction attitude. Position accuracy is often affected by multipath, non-visible [...] Read more.
The application of an ultra-wideband (UWB) positioning system in a Global Positioning System (GPS) denial environment such as an underground coal mine, mainly focuses on position information and rarely involves information such as direction attitude. Position accuracy is often affected by multipath, non-visible ranges, base station layout, and more. We proposed an IMU-assisted UWB-based positioning system for the provision of positioning and orientation services to coal miners in underground mines. The Error-State Kalman Filter (ESKF) is used to filter the errors in the measured data from the IMU-assisted UWB positioning system to obtain the best estimate of the error for the current situation and correct for inaccuracies due to approximations. The base station layout of the IMU-assisted UWB positioning system was also simulated. The reasonable setting of the reference base station location can suppress multi-access interference and improve positioning accuracy to a certain extent. Numerous simulation experiments have been conducted in GPS denial environments, such as underground coal mines. The experimental results show the effectiveness of the method for determining the position, direction, and attitude of the coal miner under the mine, which provides a better reference value for positioning and orientation in a GPS rejection environment such as under the mine. Full article
(This article belongs to the Special Issue MEMS Sensors: Past, Present and Future)
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17 pages, 4455 KiB  
Article
Three-Dimensional Performance Evaluation of Hemispherical Coriolis Vibratory Gyroscopes
by Mehrdad Mahmoudian, Joel Filho, Rui Melicio, Eduardo Rodrigues, Mojgan Ghanbari and Paulo Gordo
Micromachines 2023, 14(2), 254; https://doi.org/10.3390/mi14020254 - 19 Jan 2023
Cited by 3 | Viewed by 1219
Abstract
In this paper, the oscillation patterns and characteristics of gyroscopic reaction to rotation-induced Coriolis force and phase relations are reviewed by examining the main principles of operation of Coriolis vibratory gyroscopes based on the dynamic relations and proposed improvements in performance using parameter [...] Read more.
In this paper, the oscillation patterns and characteristics of gyroscopic reaction to rotation-induced Coriolis force and phase relations are reviewed by examining the main principles of operation of Coriolis vibratory gyroscopes based on the dynamic relations and proposed improvements in performance using parameter changes. Coriolis vibratory gyroscopes (CVGs) are among the most modern applicable gyroscopes in position detection that have replaced traditional gyroscopes due to some great features of the design of vibrating proof mass and elastic suspension. Given the key characteristics of capacitive versus piezoelectric excitation technologies for determining the vibration type in sensors, their operating principles and equations have completely changed. Therefore, two-dimensional finite element analysis is required to evaluate their optimal performance. Since the sensor space is constantly vibrating, a general equation is presented in this paper to explain the impact of parameters on the frequency of different operating modes. The main purposes of building vibrating gyroscopes are replacing the constant spinning of the rotor with a vibrating structure and utilizing the Coriolis effect, based on which the secondary motion of the sensitive object is generated according to the external angular velocity. Full article
(This article belongs to the Special Issue MEMS Sensors: Past, Present and Future)
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8 pages, 29687 KiB  
Article
Multi-Grid Capacitive Transducers for Measuring the Surface Profile of Silicon Wafers
by Panpan Zheng, Bingyang Cai, Tao Zhu, Li Yu, Wenjie Wu and Liangcheng Tu
Micromachines 2023, 14(1), 122; https://doi.org/10.3390/mi14010122 - 31 Dec 2022
Viewed by 1298
Abstract
The measurements of wafers’ surface profile are crucial for safeguarding the fabrication quality of integrated circuits and MEMS devices. The current techniques measure the profile mainly by moving a capacitive or optical spacing sensing probe along multiple lines, which is high-cost and inefficient. [...] Read more.
The measurements of wafers’ surface profile are crucial for safeguarding the fabrication quality of integrated circuits and MEMS devices. The current techniques measure the profile mainly by moving a capacitive or optical spacing sensing probe along multiple lines, which is high-cost and inefficient. This paper presents the calculation, simulation and experiment of a method for measuring the surface profile with arrayed capacitive spacing transducers. The calculation agreed well with the simulation and experiment. Finally, the proposed method was utilized for measuring the profile of a silicon wafer. The result is consistent with that measured by a commercial instrument. As a movement system is not required, the proposed method is promising for industry applications with superior cost and efficiency to the existing technology. Full article
(This article belongs to the Special Issue MEMS Sensors: Past, Present and Future)
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16 pages, 5263 KiB  
Article
GO-INO: Graph Optimization MEMS-IMU/NHC/Odometer Integration for Ground Vehicle Positioning
by Kai Zhu, Yating Yu, Bin Wu and Changhui Jiang
Micromachines 2022, 13(9), 1400; https://doi.org/10.3390/mi13091400 - 26 Aug 2022
Cited by 3 | Viewed by 1767
Abstract
Global navigation satellite system (GNSS) and inertial navigation system (INS) are indispensable for ground vehicle position and navigation. The Kalman filter (KF) is the first choice to integrate them and output more reliable navigation solutions. However, the GNSS signal is denied in urban [...] Read more.
Global navigation satellite system (GNSS) and inertial navigation system (INS) are indispensable for ground vehicle position and navigation. The Kalman filter (KF) is the first choice to integrate them and output more reliable navigation solutions. However, the GNSS signal is denied in urban areas, i.e., tunnels, and the INS position errors diverge quickly over time. Under normal conditions, the ground vehicle will not slide or jump off the ground; nonholonomic constraints (NHC) and odometers are available to aid the INS and reduce its position errors. Factor graph optimization (FGO) recently attracted attention as an advanced sensor fusion algorithm. This paper implemented the FGO method based on GNSS/INS/NHC/Odometer integration. In the FGO, state transformation, measurement model, the NHC, and the odometer were all regarded as constraints employed to construct a graph; an iterative process was utilized to find the optimal estimation results. Two experiments were carried out: firstly, the FGO-GNSS/INS performance was assessed and compared with the KF-GNSS/INS; secondly, we compared the FGO-GNSS/INS/NHC/Odometer and KF-GNSS/INS/NHC/Odometer under GNSS denied environments. Experimental results supported that the FGO improved the performance. Full article
(This article belongs to the Special Issue MEMS Sensors: Past, Present and Future)
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11 pages, 2773 KiB  
Article
Research on the Application of MEMS Intelligent Sensor in Abnormal Monitoring of Metro Tunnel by Simplified Model Tests
by Yan Gao, Ketian Sun, Jiayi Tian and Xiaodong Wu
Micromachines 2022, 13(8), 1242; https://doi.org/10.3390/mi13081242 - 02 Aug 2022
Viewed by 1411
Abstract
The current monitoring methods for tunnel structure deformation mainly focus on laser distance measurement, fiber Bragg grating, photogrammetry, electronic total station, hydrostatic leveling and so on. Compared with traditional monitoring methods, MEMS sensors have the advantages of small size, low cost, low energy [...] Read more.
The current monitoring methods for tunnel structure deformation mainly focus on laser distance measurement, fiber Bragg grating, photogrammetry, electronic total station, hydrostatic leveling and so on. Compared with traditional monitoring methods, MEMS sensors have the advantages of small size, low cost, low energy consumption and high accuracy. In this paper, MEMS sensors are used for the continuous real-time intelligent monitoring of model tunnels, and the multi-point deployment of MEMS sensors is set up for the tunnel structure monitoring with the indicators of acceleration and inclination. The results demonstrated that β-sample interpolation of the angles of the MEMS measurement points, and then integration of the overall displacements can better reflect the form of uneven settlement of the tunnel. For tunnel models with uneven settlement as the main deformation, the angle interpolation method allows the MEMS sensor to measure the vertical displacement more accurately and to determine the load mode to a certain extent. However, for tunnel models with global settlement as the main deformation, the results vary considerably from reality, as only the uneven part of the settlement can be measured using the angular interpolation method. Full article
(This article belongs to the Special Issue MEMS Sensors: Past, Present and Future)
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