Advanced Manufacturing Technology and Systems, 2nd Edition

A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "E:Engineering and Technology".

Deadline for manuscript submissions: closed (31 August 2023) | Viewed by 45924

Special Issue Editors

College of Mechanical and Electrical Engineering, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China
Interests: micromachining processes; functional micro-textured surfaces and applications
Special Issues, Collections and Topics in MDPI journals
School of Mechanical Engineering, Xi’an Jiaotong University, Xi’an 710049, China
Interests: grinding process; smart manufacturing and systems; precision machine
Special Issues, Collections and Topics in MDPI journals

Special Issue Information

Dear Colleagues,

Advanced manufacturing technology and systems (AMTS) combine principles of mechanical engineering with design innovation to create products and processes that are better, faster, and more precise. The core of AMTS is the design, fabrication, and application of original and effective solutions related to manufacturing machines, process integration, and systems to keep up with the dynamic needs of today’s ever-evolving industries. In this Special Issue, we seek papers in advanced manufacturing technology and systems that cover a broad scope involving manufacturing processes, machine tool design, system optimization, smart and flexible manufacturing, theoretical studies, and metrology. In addition, multidisciplinary (physical, chemical, micro/nano and biomedicine) manufacturing technologies and systems are welcome, including micro-/nanofabrication, nanomaterial processes, biomedical fabrication, intelligent control, energy conversion, etc. All types of papers, such as original research papers and review articles, are welcome.

Dr. Youqiang Xing
Dr. Xiuqing Hao
Dr. Duanzhi Duan
Guest Editors

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Micromachines is an international peer-reviewed open access monthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2600 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

Keywords

  • additive manufacturing
  • machining and forming technology
  • machine tool design and manufacturing
  • micro- and nanofabrication
  • smart manufacturing
  • non-traditional manufacturing processes
  • energy-efficient manufacturing
  • computer-integrated manufacturing systems
  • intelligent control and algorithm
  • system optimization
  • system reliability analysis

Related Special Issue

Published Papers (33 papers)

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Editorial

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4 pages, 169 KiB  
Editorial
Editorial for the Special Issue on Advanced Manufacturing Technology and Systems, 2nd Edition
by Youqiang Xing, Xiuqiang Hao and Duanzhi Duan
Micromachines 2023, 14(12), 2243; https://doi.org/10.3390/mi14122243 - 15 Dec 2023
Viewed by 554
Abstract
Advanced manufacturing technology and systems (AMTS) combine the principles of mechanical engineering with innovative design to create products and processes that are better, faster, and more precise [...] Full article
(This article belongs to the Special Issue Advanced Manufacturing Technology and Systems, 2nd Edition)

Research

Jump to: Editorial, Review

15 pages, 6466 KiB  
Article
Structural Design and Simulation of a Multi-Channel and Dual Working Condition Wafer Defect Inspection Prototype
by Ruizhe Ding, Haiyan Luo, Zhiwei Li, Zuoda Zhou, Dingjun Qu and Wei Xiong
Micromachines 2023, 14(8), 1568; https://doi.org/10.3390/mi14081568 - 07 Aug 2023
Cited by 1 | Viewed by 1088
Abstract
Detecting and classifying defects on unpatterned wafers is a key part of wafer front-end inspection. Defect inspection schemes vary depending on the type and location of the defects. In this paper, the structure of the prototype is designed to meet the requirements of [...] Read more.
Detecting and classifying defects on unpatterned wafers is a key part of wafer front-end inspection. Defect inspection schemes vary depending on the type and location of the defects. In this paper, the structure of the prototype is designed to meet the requirements of wafer surface and edge defect inspection. This prototype has four inspection channels: scattering, reflection, phase, and contour, with two working conditions: surface and edge inspection. The key structure of the prototype was simulated using Ansys. The simulation results show that the maximum deformation of the optical detection subsystem is 19.5 μm and the fundamental frequency of the prototype is 96.9 Hz; thus, these results meet the requirements of optical performance stability and structural design. The experimental results show that the prototype meets the requirements of the inspection sensitivity better than 200 nm equivalent PSL spherical defects. Full article
(This article belongs to the Special Issue Advanced Manufacturing Technology and Systems, 2nd Edition)
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10 pages, 2471 KiB  
Article
High-Efficiency and Reliable Value Geometric Standard: Integrated Periodic Structure Reference Materials
by Chenying Wang, Di Liu, Yaxin Zhang, Weixuan Jing, Song Wang, Feng Han, Qi Mao, Yonglu Wang, Pengcheng Zhang and Zhuangde Jiang
Micromachines 2023, 14(8), 1550; https://doi.org/10.3390/mi14081550 - 01 Aug 2023
Viewed by 815
Abstract
Integrated periodic structure reference materials are crucial for calibration in optical instruments and micro-computed tomography (micro-CT), yet they face limitations concerning a restricted measurement range, a single pattern type, and a single calibration parameter. In this study, we address these challenges by developing [...] Read more.
Integrated periodic structure reference materials are crucial for calibration in optical instruments and micro-computed tomography (micro-CT), yet they face limitations concerning a restricted measurement range, a single pattern type, and a single calibration parameter. In this study, we address these challenges by developing integrated periodic structure reference materials with an expanded measurement range, diverse pattern types, and multiple calibration parameters through a combination of photolithography and inductively coupled plasma (ICP) etching process. These reference materials facilitate high-efficiency and multi-value calibration, finding applications in the calibration of optical instruments and micro-CT systems. The simulations were conducted using MATLAB (R2022b) to examine the structure-morphology changes during the single-step ICP etching process. The variation rules governing line widths, periods, etching depths, and side wall verticality in integrated periodic structure reference materials were thoroughly evaluated. Linewidths were accurately extracted utilizing an advanced image processing algorithm, while average period values were determined through the precise Fast Fourier Transform method. The experimental results demonstrate that the relative errors of line widths do not exceed 17.5%, and the relative errors of periods do not exceed 1.5%. Furthermore, precise control of the etching depth was achieved, ranging from 30 to 60 μm for grids with line widths 2–20 μm. The side wall verticality exhibited remarkable consistency with an angle of 90° ± 0.8°, and its relative error was found to be less than 0.9%. Full article
(This article belongs to the Special Issue Advanced Manufacturing Technology and Systems, 2nd Edition)
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21 pages, 9216 KiB  
Article
In Situ Measurement and Reconstruction Technology of Cylindrical Shape of High-Precision Mandrel
by Hanwei Xu, Zizhou Sun, Yifan Dai, Chaoliang Guan and Hao Hu
Micromachines 2023, 14(6), 1240; https://doi.org/10.3390/mi14061240 - 12 Jun 2023
Viewed by 1386
Abstract
The technology of in situ measurement of cylindrical shapes is an important means of improving the surface machining accuracy of cylindrical workpieces. As a method of cylindricity measurement, the principle of the three-point method has not been fully studied and applied, so it [...] Read more.
The technology of in situ measurement of cylindrical shapes is an important means of improving the surface machining accuracy of cylindrical workpieces. As a method of cylindricity measurement, the principle of the three-point method has not been fully studied and applied, so it is seldom used in the field of high-precision cylindrical topography measurement. Since the three-point method has the advantages of a simpler measurement structure and smaller system error compared with other multi-point methods, the research on it is still of great significance. Based on the existing research results of the three-point method, this paper proposes the in situ measurement and reconstruction technology of the cylindrical shape of a high-precision mandrel by means of a three-point method. The principle of the technology is deduced in detail and an in situ measurement and reconstruction system is built to carry out the experiments. Experiment results are verified using a commercial roundness meter and the deviation of cylindricity measurement results is 10 nm, which is 2.56% of the measurement results of commercial roundness meters. This paper also discusses the advantages and application prospects of the proposed technology. Full article
(This article belongs to the Special Issue Advanced Manufacturing Technology and Systems, 2nd Edition)
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18 pages, 28115 KiB  
Article
Effect of Al Content on the Wear Evolution of Ti1-xAlxN-Coated Tools Milling Ti-6Al-4V Alloy
by Guanghui Fan, Jingjie Zhang, Peirong Zhang, Jin Du, Chonghai Xu, Mingdong Yi and Guoqing Zhang
Micromachines 2023, 14(6), 1228; https://doi.org/10.3390/mi14061228 - 10 Jun 2023
Cited by 1 | Viewed by 750
Abstract
Ti1-xAlxN coating is formed by replacing some Ti atoms in TiN with Al atoms, and their properties are closely related to Al content (0 < x < 1). Recently, Ti1-xAlxN-coated tools have been widely used [...] Read more.
Ti1-xAlxN coating is formed by replacing some Ti atoms in TiN with Al atoms, and their properties are closely related to Al content (0 < x < 1). Recently, Ti1-xAlxN-coated tools have been widely used in the machining of Ti-6Al-4V alloy. In this paper, the hard-to-machine material Ti-6Al-4V alloy is used as the study material. Ti1-xAlxN-coated tools are used for milling experiments. The evolution of the wear form and the wear mechanism of Ti1-xAlxN-coated tools are studied, and the influence of Al content (x = 0.52, 0.62) and cutting speed on tool wear are analyzed. The results show that the wear on the rake face changes from the initial adhesion and micro-chipping to coating delamination and chipping. Wear on the flank face varies from the initial adhesion and grooves to boundary wear, build-up layer, and ablation. The main wear mechanisms of Ti1-xAlxN-coated tools are dominated by adhesion, diffusion, and oxidation wear. Ti0.48Al0.52N coating protects the tool well and extends its service life. Full article
(This article belongs to the Special Issue Advanced Manufacturing Technology and Systems, 2nd Edition)
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24 pages, 15345 KiB  
Article
A Wire Bow Model of Diamond Wire Sawing with Asymmetric Arc Hypothesis
by Zhikui Dong, Chenpu Zhang, Ziliang Liu, Yanheng Zhao, Ke Xing and Wenming Guo
Micromachines 2023, 14(5), 1004; https://doi.org/10.3390/mi14051004 - 06 May 2023
Cited by 1 | Viewed by 1097
Abstract
Diamond wire sawing is the main processing method for hard and brittle materials, but the unreasonable matching of process parameters will reduce its cutting ability and stability. In this paper, the asymmetric arc hypothesis of a wire bow model is proposed. Based on [...] Read more.
Diamond wire sawing is the main processing method for hard and brittle materials, but the unreasonable matching of process parameters will reduce its cutting ability and stability. In this paper, the asymmetric arc hypothesis of a wire bow model is proposed. Based on this hypothesis, an analytical model of the wire bow between the process parameters and the wire bow parameters was established and verified with a single-wire cutting experiment. The model considers the asymmetry of the wire bow in diamond wire sawing. The tension at both ends of the wire bow is called the endpoint tension; by calculating the difference in tension between the two ends, a reference for the cutting stability and a tension range for the selection of the diamond wire were provided. The model was used to calculate the wire bow deflection and the cutting force, providing theoretical guidance for the matching of process parameters. Based on the theoretical analysis of the cutting force, endpoint tension and wire bow deflection, the cutting ability, cutting stability, and the risk of wire cutting were predicted. Full article
(This article belongs to the Special Issue Advanced Manufacturing Technology and Systems, 2nd Edition)
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15 pages, 12719 KiB  
Article
Wafer Surface Defect Detection Based on Background Subtraction and Faster R-CNN
by Jiebing Zheng and Tao Zhang
Micromachines 2023, 14(5), 905; https://doi.org/10.3390/mi14050905 - 23 Apr 2023
Cited by 4 | Viewed by 1505
Abstract
Concerning the problem that wafer surface defects are easily confused with the background and are difficult to detect, a new detection method for wafer surface defects based on background subtraction and Faster R-CNN is proposed. First, an improved spectral analysis method is proposed [...] Read more.
Concerning the problem that wafer surface defects are easily confused with the background and are difficult to detect, a new detection method for wafer surface defects based on background subtraction and Faster R-CNN is proposed. First, an improved spectral analysis method is proposed to measure the period of the image, and the substructure image can then be obtained on the basis of the period. Then, a local template matching method is adopted to position the substructure image, thereby reconstructing the background image. Then, the interference of the background can be eliminated by an image difference operation. Finally, the difference image is input into an improved Faster R-CNN network for detection. The proposed method has been validated on a self-developed wafer dataset and compared with other detectors. The experimental results show that compared with the original Faster R-CNN, the proposed method increases the mAP effectively by 5.2%, which can meet the requirements of intelligent manufacturing and high detection accuracy. Full article
(This article belongs to the Special Issue Advanced Manufacturing Technology and Systems, 2nd Edition)
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17 pages, 66881 KiB  
Article
Research on Configuration Design Optimization and Trajectory Planning of Manipulators for Precision Machining and Inspection of Large-Curvature and Large-Area Curved Surfaces
by Xiangyang Sun, Shuai He, Zhenbang Xu, Enyang Zhang and Yanhui Li
Micromachines 2023, 14(4), 886; https://doi.org/10.3390/mi14040886 - 20 Apr 2023
Viewed by 948
Abstract
In recent years, high-quality surfaces with large areas and curvatures have been increasingly used in engineering, but the precision machining and inspection of such surfaces is a particular challenge. Surface machining equipment needs to have a large working space, high flexibility, and motion [...] Read more.
In recent years, high-quality surfaces with large areas and curvatures have been increasingly used in engineering, but the precision machining and inspection of such surfaces is a particular challenge. Surface machining equipment needs to have a large working space, high flexibility, and motion accuracy to meet the demands of micron-scale precision machining. However, meeting these requirements may result in extremely large equipment sizes. To solve this problem, an eight-degree-of-freedom redundant manipulator with one linear and seven rotational joints is designed to assist in the machining described in this paper. The configuration parameters of the manipulator are optimized by an improved multi-objective particle swarm optimization algorithm to ensure that the working space of the manipulator completely covers the working surface and that the size of the manipulator is small. In order to improve the smoothness and accuracy of manipulator motion on large surface areas, an improved trajectory planning strategy for a redundant manipulator is proposed. The idea of the improved strategy is to pre-process the motion path first and then use a combination of the clamping weighted least-norm method and the gradient projection method to plan the trajectory, while adding a reverse planning step to solve the singularity problem. The resulting trajectories are smoother than those planned by the general method. The feasibility and practicality of the trajectory planning strategy are verified through simulation. Full article
(This article belongs to the Special Issue Advanced Manufacturing Technology and Systems, 2nd Edition)
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11 pages, 5042 KiB  
Article
Inductively Coupled Plasma Dry Etching of Silicon Deep Trenches with Extremely Vertical Smooth Sidewalls Used in Micro-Optical Gyroscopes
by Yuyu Zhang, Yu Wu, Quanquan Sun, Lifeng Shen, Jie Lan, Lingxi Guo, Zhenfeng Shen, Xuefang Wang, Junfeng Xiao and Jianfeng Xu
Micromachines 2023, 14(4), 846; https://doi.org/10.3390/mi14040846 - 14 Apr 2023
Viewed by 2310
Abstract
Micro-optical gyroscopes (MOGs) place a range of components of the fiber-optic gyroscope (FOG) onto a silicon substrate, enabling miniaturization, low cost, and batch processing. MOGs require high-precision waveguide trenches fabricated on silicon instead of the ultra-long interference ring of conventional F OGs. In [...] Read more.
Micro-optical gyroscopes (MOGs) place a range of components of the fiber-optic gyroscope (FOG) onto a silicon substrate, enabling miniaturization, low cost, and batch processing. MOGs require high-precision waveguide trenches fabricated on silicon instead of the ultra-long interference ring of conventional F OGs. In our study, the Bosch process, pseudo-Bosch process, and cryogenic etching process were investigated to fabricate silicon deep trenches with vertical and smooth sidewalls. Different process parameters and mask layer materials were explored for their effect on etching. The effect of charges in the Al mask layer was found to cause undercut below the mask, which can be suppressed by selecting proper mask materials such as SiO2. Finally, ultra-long spiral trenches with a depth of 18.1 μm, a verticality of 89.23°, and an average roughness of trench sidewalls less than 3 nm were obtained using a cryogenic process at −100 °C. Full article
(This article belongs to the Special Issue Advanced Manufacturing Technology and Systems, 2nd Edition)
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13 pages, 5014 KiB  
Article
Trajectory Strategy Effects on the Material Characteristics in the WAAM Technique
by Tran Minh The Uyen, Pham Son Minh, Van-Thuc Nguyen, Thanh Trung Do, Vinh Tien Nguyen, Minh-Tai Le and Van Thanh Tien Nguyen
Micromachines 2023, 14(4), 827; https://doi.org/10.3390/mi14040827 - 08 Apr 2023
Cited by 3 | Viewed by 1477
Abstract
The wire Arc Additive Manufacturing (WAAM) technique has evolved into a cutting-edge 3D printing technique. This study surveys the influences of trajectory on the characteristics of low-carbon steel samples generated by the WAAM technique. The results show that the grains in the WAAM [...] Read more.
The wire Arc Additive Manufacturing (WAAM) technique has evolved into a cutting-edge 3D printing technique. This study surveys the influences of trajectory on the characteristics of low-carbon steel samples generated by the WAAM technique. The results show that the grains in the WAAM samples are isotropic, with grain size numbers ranging from 7 to 12. Strategy 3, with a spiral trajectory, has the smallest grain size, while strategy 2, with a lean zigzag trajectory, has the largest. The variations in grain size are caused by differences in heat input and output during the printing process. The WAAM samples achieve a significantly higher UTS value than the original wire, demonstrating the WAAM technique’s benefit. Strategy 3, with a spiral trajectory, achieves the highest UTS value, 616.5 MPa, 24% higher than the original wire. The UTS values of strategy 1 (horizontal zigzag trajectory) and strategy 4 (curve zigzag trajectory) are comparable. WAAM samples have significantly higher elongation values than the original wire, with only 22% elongation. The sample with the highest elongation value, 47.2%, was produced by strategy 3. Strategy 2 has an elongation value of 37.9%. The value of elongation is proportional to the value of UTS. WAAM samples have average elastic modulus values of 95.8 GPa, 173.3 GPa, 92.2 GPa, and 83.9 GPa, corresponding to strategies 1, 2, 3, and 4. Only a strategy 2 sample has a similar elastic modulus value to the original wire. All samples have dimples on the fracture surface, indicating that the WAAM samples are ductile. These fracture surfaces’ equiaxial shape corresponds to the original microstructure’s equiaxial shape. The results provide the optimal trajectory for the WAAM products is the spiral trajectory, while the lean zigzag trajectory gains only modest characteristics. Full article
(This article belongs to the Special Issue Advanced Manufacturing Technology and Systems, 2nd Edition)
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17 pages, 11783 KiB  
Article
Research on Robotic Compliance Control for Ultrasonic Strengthening of Aviation Blade Surface
by Shanxiang Fang, Yao Du, Yong Zhang, Fanbo Meng and Marcelo H. Ang, Jr.
Micromachines 2023, 14(4), 730; https://doi.org/10.3390/mi14040730 - 25 Mar 2023
Viewed by 1087
Abstract
In order to satisfy the requirement of the automatic ultrasonic strengthening of an aviation blade surface, this paper puts forward a robotic compliance control strategy of contact force for ultrasonic surface strengthening. By building the force/position control method for robotic ultrasonic surface strengthening., [...] Read more.
In order to satisfy the requirement of the automatic ultrasonic strengthening of an aviation blade surface, this paper puts forward a robotic compliance control strategy of contact force for ultrasonic surface strengthening. By building the force/position control method for robotic ultrasonic surface strengthening., the compliant output of the contact force is achieved by using the robot’s end-effector (compliant force control device). Based on the control model of the end-effector obtained from experimental determination, a fuzzy neural network PID control is used to optimize the compliance control system, which improves the adjustment accuracy and tracking performance of the system. An experimental platform is built to verify the effectiveness and feasibility of the compliance control strategy for the robotic ultrasonic strengthening of an aviation blade surface. The results demonstrate that the proposed method maintains the compliant contact between the ultrasonic strengthening tool and the blade surface under multi-impact and vibration conditions. Full article
(This article belongs to the Special Issue Advanced Manufacturing Technology and Systems, 2nd Edition)
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19 pages, 10688 KiB  
Article
Effect of Coating Thickness on Abrasion and Cutting Performance of NCD-Coated Ball Endmills on Graphite Machining
by Hyeonhwa Lee, Jinsoo Kim, Sungcheul Lee, Jongeun Park, Jeongyeon Park and Jongsu Kim
Micromachines 2023, 14(3), 664; https://doi.org/10.3390/mi14030664 - 16 Mar 2023
Cited by 1 | Viewed by 1023
Abstract
Nano-crystalline diamond (NCD) coating to improve the performance of cutting tools, as the coating thickness varies, the cutting performance and lifespan of the tool varies because the radius of its cutting edge and coating surface roughness are altered. Therefore, an in-depth analysis on [...] Read more.
Nano-crystalline diamond (NCD) coating to improve the performance of cutting tools, as the coating thickness varies, the cutting performance and lifespan of the tool varies because the radius of its cutting edge and coating surface roughness are altered. Therefore, an in-depth analysis on the impact of the variations in coating thickness on the cutting tool abrasion and quality of machined surface is necessary. In this study, two NCD ball endmills were coated with 8 and 12 μm thicknesses, and the tool abrasion and roughness of the machined plane were observed after milling. Furthermore, the morphology of the coated surface and abrased cutting edge were observed using a 3D confocal microscope. Consequently, we observed that individual nodules were formed on the continuous aggregates as the coating thickness increased, which increased the coated surface roughness. The two damage modes of the aggregation determined the dominant abrasion that occurred on the cutting edges of both types of coating thicknesses. Delamination and crater wear caused a sharp increase in the roughness of the machined surface. In summary, the increase in coating thickness delayed the delamination of the coating but increased the roughness of the cutting edge, which reduced the machined surface roughness. Full article
(This article belongs to the Special Issue Advanced Manufacturing Technology and Systems, 2nd Edition)
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13 pages, 6079 KiB  
Article
Fabrication of MoS2/C60 Nanolayer Field-Effect Transistor for Ultrasensitive Detection of miRNA-155
by Youqiang Xing, Yun Wang, Lei Liu and Ze Wu
Micromachines 2023, 14(3), 660; https://doi.org/10.3390/mi14030660 - 15 Mar 2023
Cited by 2 | Viewed by 1462
Abstract
As a major public health issue, early cancer detection is of great significance. A field-effect transistor (FET) based on an MoS2/C60 composite nanolayer as the channel material enhances device performance by adding a light source, allowing the ultrasensitive detection of [...] Read more.
As a major public health issue, early cancer detection is of great significance. A field-effect transistor (FET) based on an MoS2/C60 composite nanolayer as the channel material enhances device performance by adding a light source, allowing the ultrasensitive detection of cancer-related miRNA. In this work, atomic layer deposition (ALD) was used to deposit MoS2 layer by layer, and C60 was deposited by an evaporation coater to obtain a composite nanolayer with good surface morphology as the channel material of the FET. Based on the good absorption of C60 by blue-violet light, a 405 nm laser was selected to irradiate the channel material, improving the function of FET biosensors. A linear detection window from 10 pM to 1 fM with an ultralow detection limit of 5.16 aM for miRNA-155 was achieved. Full article
(This article belongs to the Special Issue Advanced Manufacturing Technology and Systems, 2nd Edition)
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20 pages, 12607 KiB  
Article
Experimental Study on Coaxial Waterjet-Assisted Laser Scanning Machining of Nickel-Based Special Alloy
by Jiajia Wang, Bin Wang, Chenhu Yuan, Aibing Yu, Wenwu Zhang and Liyuan Sheng
Micromachines 2023, 14(3), 641; https://doi.org/10.3390/mi14030641 - 12 Mar 2023
Viewed by 1495
Abstract
The problems of the recast layer, oxide layer, and heat-affected zone (HAZ) in conventional laser machining seriously impact material properties. Coaxial waterjet-assisted laser scanning machining (CWALSM) can reduce the conduction and accumulation of heat in laser machining by the high specific heat capacity [...] Read more.
The problems of the recast layer, oxide layer, and heat-affected zone (HAZ) in conventional laser machining seriously impact material properties. Coaxial waterjet-assisted laser scanning machining (CWALSM) can reduce the conduction and accumulation of heat in laser machining by the high specific heat capacity of water and can realize the machining of nickel-based special alloy with almost no thermal damage. With the developed experimental setup, the laser ablation threshold and drilling experiments of the K4002 nickel-based special alloy were carried out. The effects of various factors on the thermal damage thickness were studied with an orthogonal experiment. Experimental results have indicated that the ablation threshold of K4002 nickel-based special alloy by a single pulse is 4.15 J/cm2. The orthogonal experiment results have shown that the effects of each factor on the thermal damage thickness are in the order of laser pulse frequency, waterjet speed, pulse overlap rate, laser pulse energy, and focal plane position. When the laser pulse energy is 0.21 mJ, the laser pulse frequency is 1 kHz, the pulse overlap is 55%, the focal plane position is 1 mm, and the waterjet speed is 6.98 m/s, no thermal damage machining can be achieved. In addition, a comparative experiment with laser drilling in the air was carried out under the same conditions. The results have shown that compared with laser machining in the air, the thermal damage thickness of CWALSM is smaller than 1 μm, and the hole taper is reduced by 106%. There is no accumulation and burr around the hole entrance, and the thermal damage thickness range is 0–0.996 μm. Furthermore, the thermal damage thickness range of laser machining in the air is 0.499–2.394 μm. It has also been found that the thermal damage thickness is greatest at the entrance to the hole, decreasing as the distance from the entrance increases. Full article
(This article belongs to the Special Issue Advanced Manufacturing Technology and Systems, 2nd Edition)
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13 pages, 4198 KiB  
Article
Three-Dimensional Displacement Measurement of Micro-Milling Tool Based on Fiber Array Encoding
by Binghui Jia and Min Zhang
Micromachines 2023, 14(3), 631; https://doi.org/10.3390/mi14030631 - 10 Mar 2023
Cited by 1 | Viewed by 1216
Abstract
The vibration of the micro-milling tool presents a significant chaotic vibration phenomenon, which has a great influence on the tool life and part machining precision, and is one of the basic problems restricting the improvement of machining efficiency and machining accuracy in micro-milling. [...] Read more.
The vibration of the micro-milling tool presents a significant chaotic vibration phenomenon, which has a great influence on the tool life and part machining precision, and is one of the basic problems restricting the improvement of machining efficiency and machining accuracy in micro-milling. To overcome the difficulty of the traditional vibration measurement method with the online measurement of micro-milling tool multi-dimensional vibration, a three-dimensional (3D) measurement method of the micro-milling tool is proposed based on multi-fiber array coding, which converts the tool space motion into a decoding process of the optical coding array employing the tool modulating the multi-fiber array encoding. A 6 × 6 optical fiber array was designed, and a 3D motion platform for micro-milling tools was built to verify the characteristics of the optical fiber measurement system. The measurement results show that the measuring accuracy of the system reached 1 µm, and the maximum linear error in x-, y-, and z-direction are 1.5%, 2.58%, and 2.43%, respectively; the tool space motion position measurement results show that the maximum measurement error of the measuring system was 3.4%. The designed system has unique coding characteristics for the tool position in the space of 100 µm3. It provides a new idea and realization means for the online vibration measurement of micro-milling tools. Full article
(This article belongs to the Special Issue Advanced Manufacturing Technology and Systems, 2nd Edition)
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26 pages, 10454 KiB  
Article
Research on Interface Bonding Properties of TiAlSiN/WC-Co Doped with Graphene
by Junru Yang, Yan Wang, Hao Lv, Yanping Yue, Shulei Li and Ran Zhu
Micromachines 2023, 14(2), 431; https://doi.org/10.3390/mi14020431 - 11 Feb 2023
Viewed by 978
Abstract
Based on the first-principles method, TiAlSiN/WC-Co interface models with graphene doped into the matrix, coating, and the coating/matrix are constructed. The interface adhesion work is calculated and modeled to study the interface bonding properties from the atomic microscopic point of view. The results [...] Read more.
Based on the first-principles method, TiAlSiN/WC-Co interface models with graphene doped into the matrix, coating, and the coating/matrix are constructed. The interface adhesion work is calculated and modeled to study the interface bonding properties from the atomic microscopic point of view. The results show that the interface bonding properties of TiAlSiN/WC-Co can be improved when the matrix is doped with the main surface of intrinsic graphene, and the interface bonding property of TiAlSiNN/WC-Co can be improved when the coating and coating/matrix are doped separately with the main surface of intrinsic graphene or single vacancy defective graphene. Furthermore, the model electronic structures are analyzed. The results show that there exist strong Si/Co and N/Co covalent bonds in the interfaces when the matrix is doped with the main surface of intrinsic graphene, which causes the adhesion work of TiAlSiN/WC/msGR/Co to be greater than that of TiAlSiN/WC-Co. Additionally, when the graphene is doped into the coating, in the interface of TiAlSiN/msGR/TiAlSiNN/WC-Co, there exist strong N/Co covalent bonds that increase the interface adhesion work. Additionally, more charge transfer and orbital hybridization exist in the coating/matrix interface doped with the main surface of intrinsic graphene or single vacancy defective graphene, which explains the essential mechanism that the adhesion work of TiAlSiNN/msGR/WC-Co is greater than that of TiAlSiNN/WC-Co, and the adhesion work of TiAlSiNN/svGR/WC-Co is greater than that of TiAlSiNN/WC-Co. Full article
(This article belongs to the Special Issue Advanced Manufacturing Technology and Systems, 2nd Edition)
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14 pages, 3703 KiB  
Article
Experimental Investigation of Discharge Phenomena in Electrochemical Discharge Machining Process
by Weidong Tang, Yuhao Zhu, Xiaoming Kang and Cong Mao
Micromachines 2023, 14(2), 367; https://doi.org/10.3390/mi14020367 - 31 Jan 2023
Cited by 5 | Viewed by 1203
Abstract
Electrochemical discharge machining (ECDM) is a promising non−traditional processing technology used to machine non−conductive materials, such as glass and ceramic, based on the evoked electrochemical discharge phenomena around the tool electrode. The discharge in ECDM is a key factor that affects the removal [...] Read more.
Electrochemical discharge machining (ECDM) is a promising non−traditional processing technology used to machine non−conductive materials, such as glass and ceramic, based on the evoked electrochemical discharge phenomena around the tool electrode. The discharge in ECDM is a key factor that affects the removal of material. Moreover, the discharge current is an important indicator reflecting the discharge state. However, the discharge characteristics remain an open topic for debate and require further investigation. There is still confusion regarding the distinction of the discharge current from the electrochemical reaction current in ECDM. In this study, high−speed imaging technology was applied to the investigation of the discharge characteristics. By comparing the captured discharge images with the corresponding discharge current, the discharge can be classified into three types. The observations of the discharge effect on the gas film indicate that a force was exerted on the gas film during the discharge process and the shape of the gas film was changed by the force. In addition, the energies released by different types of discharge were calculated according to the voltage and current waveforms. The discharge frequency was found to increase with the increase in applied voltage and the frequency of the second type of discharge was approximately equal to that of the third type when the applied voltage was higher than 40 V. Full article
(This article belongs to the Special Issue Advanced Manufacturing Technology and Systems, 2nd Edition)
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20 pages, 4518 KiB  
Article
Statistical Analysis of Surface Roughness, Burr Formation and Tool Wear in High Speed Micro Milling of Inconel 600 Alloy under Cryogenic, Wet and Dry Conditions
by Amjad Baig, Syed Husain Imran Jaffery, Muhammad Ali Khan and Mansoor Alruqi
Micromachines 2023, 14(1), 13; https://doi.org/10.3390/mi14010013 - 21 Dec 2022
Cited by 7 | Viewed by 1633
Abstract
Super alloys offer excellent mechanical and chemical properties at elevated temperatures that make them an attractive choice for aerospace, automotive and chemical processing, and marine applications. These alloys are, however, difficult to machine due to their high strength at elevated temperatures, low thermal [...] Read more.
Super alloys offer excellent mechanical and chemical properties at elevated temperatures that make them an attractive choice for aerospace, automotive and chemical processing, and marine applications. These alloys are, however, difficult to machine due to their high strength at elevated temperatures, low thermal conductivity and work hardening. In this study, micro milling of Inconel 600 super alloy has been carried out and the effects of the key input parameters (cutting speed, feed rate, depth of cut) on response parameters (burr formation, surface roughness and tool wear), under various cooling conditions (dry, wet and cryogenic), have been analyzed. High speed micro milling (range up to 80,000 RPM) was carried out, while keeping the feed rate values below and above the cutting edge radius. The Taguchi design of experiments was used during this study. The results have been analyzed using SEM and 3D optical microscopy. Analysis of Variance (ANOVA) revealed that the best surface roughness values can be achieved under cryogenic machining condition with an overall contribution ratio of 28.69%. It was also revealed that cryogenic cooling resulted in the highest tool life with the contribution ratio of cooling conditions at 26.52%. Full article
(This article belongs to the Special Issue Advanced Manufacturing Technology and Systems, 2nd Edition)
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14 pages, 6436 KiB  
Article
Free-Form Surface Partitioning and Simulation Verification Based on Surface Curvature
by Hongwei Liu, Enzhong Zhang, Ruiyang Sun, Wenhui Gao and Zheng Fu
Micromachines 2022, 13(12), 2163; https://doi.org/10.3390/mi13122163 - 07 Dec 2022
Viewed by 1097
Abstract
To address the problem of low overall machining efficiency of free-form surfaces and difficulty in ensuring machining quality, this paper proposes a MATLAB-based free-form surface division method. The surface division is divided into two stages: Partition area identification and area boundary determination. In [...] Read more.
To address the problem of low overall machining efficiency of free-form surfaces and difficulty in ensuring machining quality, this paper proposes a MATLAB-based free-form surface division method. The surface division is divided into two stages: Partition area identification and area boundary determination. In the first stage, the free-form surface is roughly divided into convex, concave, and saddle regions according to the curvature of the surface, and then the regions are subdivided based on the fuzzy c-means clustering algorithm. In the second stage, according to the clustering results, the Voronoi diagram algorithm is used to finally determine the boundary of the surface patch. We used NURBS to describe free-form surfaces and edit a set of MATLAB programs to realize the division of surfaces. The proposed method can easily and quickly divide the surface area, and the simulation results show that the proposed method can shorten machining time by 36% compared with the traditional machining method. It is proved that the method is practical and can effectively improve the machining efficiency and quality of complex surfaces. Full article
(This article belongs to the Special Issue Advanced Manufacturing Technology and Systems, 2nd Edition)
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18 pages, 6469 KiB  
Article
Design of Longitudinal–Torsional Transducer and Directivity Analysis during Ultrasonic Vibration-Assisted Milling of Honeycomb Aramid Material
by Mingxing Zhang, Zuotian Ma, Xiaodong Wang, Ting Meng and Xiangqun Li
Micromachines 2022, 13(12), 2154; https://doi.org/10.3390/mi13122154 - 06 Dec 2022
Cited by 1 | Viewed by 1235
Abstract
This paper presents a longitudinal–torsional transducer for use during the ultrasonic vibration-assisted milling (UVAM) of honeycomb aramid material. The mechanism of longitudinal–torsional conversion was analyzed to guide the design of a vibration transducer. The transducer features five spiral grooves around the front cover [...] Read more.
This paper presents a longitudinal–torsional transducer for use during the ultrasonic vibration-assisted milling (UVAM) of honeycomb aramid material. The mechanism of longitudinal–torsional conversion was analyzed to guide the design of a vibration transducer. The transducer features five spiral grooves around the front cover plate, which function under the excitation of a group of longitudinal piezoelectric ceramics. A portion of the longitudinal vibration was successfully converted into torsional vibration. The resonant frequency, longitudinal vibration displacement and torsional amplitude at the top of the disk milling cutter were 24,609 Hz, 19 μm and 9 μm, respectively. In addition, the directivity of the longitudinal–torsional transducer was theoretically analyzed. Compared with conventional milling, UVAM with the longitudinal-torsional could significantly reduce the cutting force (40–50%) and improve the machining stability. Full article
(This article belongs to the Special Issue Advanced Manufacturing Technology and Systems, 2nd Edition)
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22 pages, 8350 KiB  
Article
An Intelligent Logic-Based Mold Breakout Prediction System Algorithm for the Continuous Casting Process of Steel: A Novel Study
by Md Obaidullah Ansari, Joyjeet Ghose, Somnath Chattopadhyaya, Debasree Ghosh, Shubham Sharma, Prashant Sharma, Abhinav Kumar, Changhe Li, Rajesh Singh and Sayed M. Eldin
Micromachines 2022, 13(12), 2148; https://doi.org/10.3390/mi13122148 - 05 Dec 2022
Cited by 2 | Viewed by 2331
Abstract
Mold breakout is one of the significant problems in a continuous casting machine (caster). It represents one of the key areas within the steel production facilities of a steel plant. A breakout event on a caster will always cause safety hazards, high repair [...] Read more.
Mold breakout is one of the significant problems in a continuous casting machine (caster). It represents one of the key areas within the steel production facilities of a steel plant. A breakout event on a caster will always cause safety hazards, high repair costs, loss of production, and shutdown of the caster for a short while. In this paper, a logic-judgment-based mold breakout prediction system has been developed for a continuous casting machine. This system developed new algorithms to detect the different sticker behaviors. With more algorithms running, each algorithm is more specialized in the other behaviors of stickers. This new logic-based breakout prediction system (BOPS) not only detects sticker breakouts but also detects breakouts that takes place due to variations in casting speed, mold level fluctuation, and taper/mold problems. This system also finds the exact location of the breakout in the mold and reduces the number of false alarms. The task of the system is to recognize a sticker and prevent a breakout. Moreover, the breakout prediction system uses an online thermal map of the mold for process visualization and assisting breakout prediction. This is done by alerting the operating staff or automatically reducing the cast speed according to the location of alarmed thermocouples, the type of steel, the tundish temperature, and the size of the cold slab width. By applying the proposed model in an actual steel plant, field application results show that it could timely detect all 13 breakouts with a detection ratio of 100%, and the frequency of false alarms was less than 0.056% times/heat. It has the additional advantage of not needing a lot of learning data, as most neural networks do. Thus, this new logical BOPS system should not only detect the sticker breakouts but also detect breakouts taking place due to variations in casting speed and mold level fluctuation. Full article
(This article belongs to the Special Issue Advanced Manufacturing Technology and Systems, 2nd Edition)
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13 pages, 6612 KiB  
Article
Effect of Local Annealing on Magnetic Flux Distribution and Noise in a Micro-Generator with Amorphous Shell
by Chang-Hung Hsu
Micromachines 2022, 13(12), 2086; https://doi.org/10.3390/mi13122086 - 26 Nov 2022
Cited by 1 | Viewed by 1154
Abstract
This study examined micro-alternators with two different housing structures––an uncoated shell and a shell coated with an iron-based amorphous-alloy soft magnetic material. The electromagnetic power and noise characteristics of generators with these shell structures were measured and analyzed. The material used for the [...] Read more.
This study examined micro-alternators with two different housing structures––an uncoated shell and a shell coated with an iron-based amorphous-alloy soft magnetic material. The electromagnetic power and noise characteristics of generators with these shell structures were measured and analyzed. The material used for the shell coating was the SA1 amorphous alloy. The magnetic property of the SA1 material was evaluated, including its hysteresis expansion, hysteresis-loop parameters, α-Fe crystal formation, thermogravimetric transfer, and Curie temperature. The center point of the casing was subjected to flame local-heating annealing to attain ferromagnetism and paramagnetism material characteristics. The experimental shell was between these magnetic-phase-transition properties and was used to observe the magnetic power and noise characteristics of the microgenerator. The measured magnetic flux at the center of the amorphous shell was 1.2–2.4 mT, and the magnetic flux distributed around the shell was 0.6–1.0 mT. The generator with the amorphous-alloy shell had the lowest demagnetization rate in the permanent magnet region, which was close to the bottom of the pole piece, and the magnetic flux leakage of the pole-piece side frame changed the magnetic flux path, thus affecting the demagnetization performance. For the noise experiment, the flame-annealing temperature of the local center point of the amorphous casing reached the Curie temperature, and the noise characteristics of the casing can be reduced by 15 dB compared to those of the generator without the casing. However, the overall performance of generator harmonics and power were not fully improved. Full article
(This article belongs to the Special Issue Advanced Manufacturing Technology and Systems, 2nd Edition)
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17 pages, 6212 KiB  
Article
Sawing Force Prediction Model and Experimental Study on Vibration-Assisted Diamond Wire Sawing
by Chenpu Zhang, Zhikui Dong, Yanheng Zhao, Ziliang Liu, Shang Wu and Jiahao Yang
Micromachines 2022, 13(11), 2026; https://doi.org/10.3390/mi13112026 - 19 Nov 2022
Cited by 1 | Viewed by 1347
Abstract
Diamond wire sawing is the main machining technology for slicing various brittle materials, such as crystalline silicon, SiC, and NdFeB. Due to their high hardness and high brittleness, as well as the ease with which the surfaces of machined materials are damaged, it [...] Read more.
Diamond wire sawing is the main machining technology for slicing various brittle materials, such as crystalline silicon, SiC, and NdFeB. Due to their high hardness and high brittleness, as well as the ease with which the surfaces of machined materials are damaged, it is difficult to further improve the sawing efficiency and the surface quality based on research conducted on the original machining method. In this paper, a vibration-assisted diamond wire sawing method is proposed. We analyzed the impact of load on the ingot, motion trajectory, and sawing depth of the abrasive particles, and a macroscopic sawing force prediction model for the vibration-assisted sawing method was established and verified via experiments. Based on the single-wire-sawing experiment and prediction model, the influences of the vibration parameters and sawing parameters on the sawing force were determined. The influences of vibration assistance on the surface quality, including the roughness profile, waviness profile, thickness profile, Ra, and Rz, were explored through single-wire-sawing experiments, and the influences of vibration assistance on the geometric parameters of slices, such as the total thickness variation (TTV) and warp, were explored through multi-wire-sawing experiments. It was found that vibration-assisted sawing can reduce sawing force and improve surface quality. Full article
(This article belongs to the Special Issue Advanced Manufacturing Technology and Systems, 2nd Edition)
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13 pages, 3133 KiB  
Article
Simulation of Laser-Heating and Energetic Plasma Plume Expansion in Pulsed Laser Deposition of Y3Fe5O12
by Joko Suwardy, Muzakkiy Putra Muhammad Akhir, Robi Kurniawan, Beni Rio Hermanto, Isa Anshori and Mohammad Hamzah Fauzi
Micromachines 2022, 13(11), 2012; https://doi.org/10.3390/mi13112012 - 18 Nov 2022
Cited by 1 | Viewed by 2126
Abstract
In the present study, numerically iterative models are employed to study two processes involved in the pulsed laser deposition of an Y3Fe5O12 target. The 1D conduction heat model is used to evaluate the temperature of the target irradiated [...] Read more.
In the present study, numerically iterative models are employed to study two processes involved in the pulsed laser deposition of an Y3Fe5O12 target. The 1D conduction heat model is used to evaluate the temperature of the target irradiated by a nano-second pulse laser, taking into account the plasma shielding effect. Further, the gas dynamics model is employed to simulate the kinetic of plasma plume expansion. The results may be important in obtaining high-quality Y3Fe5O12 thin films. Full article
(This article belongs to the Special Issue Advanced Manufacturing Technology and Systems, 2nd Edition)
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11 pages, 4847 KiB  
Article
Effect of Punch Surface Microtexture on the Microextrudability of AA6063 Micro Backward Extrusion
by Tatsuya Funazuka, Kuniaki Dohda, Tomomi Shiratori, Syunsuke Horiuchi and Ikumu Watanabe
Micromachines 2022, 13(11), 2001; https://doi.org/10.3390/mi13112001 - 17 Nov 2022
Cited by 1 | Viewed by 1339
Abstract
To apply conventional forming processes to microscale processing, the influence of size effects caused by material properties and friction effects must be considered. Herein, the effects of tool surface properties, such as punch surface texture, on microextrusion properties, such as extrusion force, product [...] Read more.
To apply conventional forming processes to microscale processing, the influence of size effects caused by material properties and friction effects must be considered. Herein, the effects of tool surface properties, such as punch surface texture, on microextrusion properties, such as extrusion force, product shape, and product microstructure, were investigated using AA6063 billets as test pieces. Millimeter-scale, microscale, and nanoscale textures were fabricated on the punch surfaces. Punch texturing was conducted by electrical discharge machining or polishing or using a laser process. The extrusion force increased rapidly as the stroke progressed for all punch textures. Comparing the product shapes, the smaller the texture size, the lower the adhesion and the longer the backward extrusion length. The results of material analysis using electron backscatter diffraction show that material flowability is improved, and more strain is uniformly applied when a nanoscale-textured punch is used. By contrast, when a mirror punch was used, material flowability decreased, and strain was applied non-uniformly. Therefore, by changing the surface properties of the punch, the tribology between the tool and material can be controlled, and formability can be improved. Full article
(This article belongs to the Special Issue Advanced Manufacturing Technology and Systems, 2nd Edition)
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16 pages, 8369 KiB  
Article
Effect of Tool Coatings on Machining Properties of Compacted Graphite Iron
by Xiaonan Ai, Jun Tan, Hui Sun, Lu Lu, Zhenming Yang, Zhongguang Yu, Guojun Liao, Shiyong Li, Yilin Jin, Yusheng Niu, Ning He and Xiuqing Hao
Micromachines 2022, 13(10), 1781; https://doi.org/10.3390/mi13101781 - 19 Oct 2022
Cited by 1 | Viewed by 1129
Abstract
Compacted graphite iron (CGI) has become the most ideal material for automotive engine manufacturing owing to its excellent mechanical properties. However, tools are severely worn during processing, considerably shortening their lifespan. In this study, we prepared a series of cemented carbide-coated tools and [...] Read more.
Compacted graphite iron (CGI) has become the most ideal material for automotive engine manufacturing owing to its excellent mechanical properties. However, tools are severely worn during processing, considerably shortening their lifespan. In this study, we prepared a series of cemented carbide-coated tools and evaluated their coating properties in cutting tests. Among all tested coatings, PVD coating made of AlCrN (AC) presented with the best surface integrity and mechanical properties, achieving the best comprehensive performance in the coating test. The AC-coated tool also exhibited the best cutting performance at a low speed of 120 m/min, corresponding to a 60% longer cutting life and the lowest workpiece surface roughness relative to other coated tools. In the cutting test at a high speed of 350 m/min, the CVD double-layer coated tool (MT) with a TiCN inner layer of and an Al2O3 outer layer had a 70% longer cutting life and the lowest workpiece surface roughness relative to other coated tools. Full article
(This article belongs to the Special Issue Advanced Manufacturing Technology and Systems, 2nd Edition)
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10 pages, 4955 KiB  
Article
Experimental Study on Surface Integrity of Solar Cell Silicon Wafers Sliced by Electrochemical Multi-Wire Saw
by Guanpei Bao, Chen Huang, Yajing Zhang, Zhen Yu and Wei Wang
Micromachines 2022, 13(9), 1469; https://doi.org/10.3390/mi13091469 - 04 Sep 2022
Viewed by 1940
Abstract
Electrochemical multi-wire sawing (EMWS) is a hybrid machining method based on a traditional multi-wire sawing (MWS) system. In this new method, a silicon ingot is connected to a positive electrode; the slicing wire is connected to a negative electrode. Material is removed by [...] Read more.
Electrochemical multi-wire sawing (EMWS) is a hybrid machining method based on a traditional multi-wire sawing (MWS) system. In this new method, a silicon ingot is connected to a positive electrode; the slicing wire is connected to a negative electrode. Material is removed by the interaction of mechanical grinding and an electrochemical reaction. In this paper, contrast experiments of EMWS and MWS were conducted based on industrialized equipment to verify the beneficial effects of the hybrid method. The experimental statistical results show that the composite processing method improved the processing qualification rate by 1.28%, and the Bow of silicon wafers was reduced by about 2.74 microns. Further testing on the surface of the silicon wafer after electrochemical action showed that obvious holes were present on the surface, and the surface hardness of the wafer decreased significantly. Therefore, the scratches on the surface of wafer sliced by EMWS were reduced; in addition, the thickness of the surface damage layer was reduced by about 9 microns. After standard texturing, the average reflectivity of the wafers sliced by EMWS was about 2–10% lower than that of the wafers sliced by MWS in the wavelength of 300–1100 nm. In this paper, the voltage parameter of the composite machining is set to 48 V; the amount of electrolyte added in each experiment is 2 L; and a good machining effect is obtained. In the future, the electric parameters and cutting fluid components will be further studied to improve the electrochemical effect. Full article
(This article belongs to the Special Issue Advanced Manufacturing Technology and Systems, 2nd Edition)
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11 pages, 2542 KiB  
Article
A Study on the Sub-5 nm Nano-Step Height Reference Materials Fabricated by Atomic Layer Deposition Combined with Wet Etching
by Chenying Wang, Lei Li, Weixuan Jing, Yaxin Zhang, Song Wang, Qijing Lin, Dan Xian, Qi Mao, Yijun Zhang, Duanzhi Duan, Ming Liu and Zhuangde Jiang
Micromachines 2022, 13(9), 1454; https://doi.org/10.3390/mi13091454 - 02 Sep 2022
Cited by 2 | Viewed by 1142
Abstract
Nano-steps, as classical nano-geometric reference materials, are very important for calibrating measurements in the semiconductor industry; therefore, controlling the height of nano-steps is critical for ensuring accurate measurements. Accordingly, in this study nano-steps with heights of 1, 2, 3 and 4 nm were [...] Read more.
Nano-steps, as classical nano-geometric reference materials, are very important for calibrating measurements in the semiconductor industry; therefore, controlling the height of nano-steps is critical for ensuring accurate measurements. Accordingly, in this study nano-steps with heights of 1, 2, 3 and 4 nm were fabricated with good morphology using atomic layer deposition (ALD) combined with wet etching. The roughness of the fabricated nano-steps was effectively controlled by utilizing the three-dimensional conformal ALD process. Moreover, the relationship between the surface roughness and the height was studied using a simulation-based analysis. Essentially, roughness control is crucial in fabricating nano-steps with a critical dimension of less than 5 nm. In this study, the minimum height of a nano-step that was successfully achieved by combining ALD and wet etching was 1 nm. Furthermore, the preconditions for quality assurance for a reference material and the influencing factors of the fabrication method were analyzed based on the 1 nm nano-step sample. Finally, the fabricated samples were used in time-dependent experiments to verify the optimal stability of the nano-steps as reference materials. This research is instructive to fabricate nano-geometric reference materials to within 5 nm in height, and the proposed method can be easily employed to manufacture wafer-sized step height reference materials, thus enabling its large-scale industrial application for in-line calibration in integrated circuit production lines. Full article
(This article belongs to the Special Issue Advanced Manufacturing Technology and Systems, 2nd Edition)
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12 pages, 5647 KiB  
Article
Effect of Textured Dimples on the Tribological Behavior of WC/Co Cemented Carbide in Dry Sliding with Al2O3/WC Ceramic
by Jiansong Chen and Ze Wu
Micromachines 2022, 13(8), 1269; https://doi.org/10.3390/mi13081269 - 06 Aug 2022
Cited by 11 | Viewed by 1511
Abstract
Micro-dimples were fabricated on the surface of WC/Co cemented carbide disks by laser, and dry friction tests were carried out by sliding with Al2O3/WC ceramic balls. Results show that the textured cemented carbide can reduce the average friction coefficient [...] Read more.
Micro-dimples were fabricated on the surface of WC/Co cemented carbide disks by laser, and dry friction tests were carried out by sliding with Al2O3/WC ceramic balls. Results show that the textured cemented carbide can reduce the average friction coefficient by about 30% compared to the smooth sample, while the textured cemented carbide with solid lubricants can reduce the average friction coefficient by about 50%. The density of textured dimples has no obvious influence on the friction coefficient. The wear rates of worn ceramic balls continue to decline with the increase in sliding speeds. The wear rates of the ceramic balls can be reduced by 40~50% for textured samples and about 65% for textured samples with solid lubricants compared to the untextured ones. The mechanism for improving the tribological properties of cemented carbide materials is that the textured dimples can store lubricants and capture wear debris, which would play an important role in promoting the engineering application of surface texturing in cemented carbide materials. Full article
(This article belongs to the Special Issue Advanced Manufacturing Technology and Systems, 2nd Edition)
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11 pages, 5105 KiB  
Article
Clamping Fatigue Properties of Shrink-Fit Holder
by Zhouyi Lai, Zhenyu Zhao, Ting Guo, Yuyin Luo, Houming Zhou and Changan Li
Micromachines 2022, 13(8), 1263; https://doi.org/10.3390/mi13081263 - 05 Aug 2022
Cited by 2 | Viewed by 1270
Abstract
In order to explore the clamping fatigue properties of shrink-fit holders, ANSYS software was used in this study to analyze the thermal and contact stresses during the clamping process of the shrink-fit holder, and the fatigue analysis was performed by selecting the dangerous [...] Read more.
In order to explore the clamping fatigue properties of shrink-fit holders, ANSYS software was used in this study to analyze the thermal and contact stresses during the clamping process of the shrink-fit holder, and the fatigue analysis was performed by selecting the dangerous areas based on the two stresses. A numerical control shrink-fit holder clamping fatigue test device was manufactured, and the automatic clamping of the shrink-fit holder was executed in this study. After 500 clamping repetitions, a milling test was carried out on the shrink-fit bracket. By collecting the vibration signal of the workpiece during processing and measuring the change in the surface roughness of the workpiece, and then analyzing the change in the machining performance of the shrink-fit holder under different clamping times, we were able to compare and verify the accuracy of the finite element fatigue analysis. Full article
(This article belongs to the Special Issue Advanced Manufacturing Technology and Systems, 2nd Edition)
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25 pages, 3610 KiB  
Article
Sequential Covariance Intersection Fusion Robust Time-Varying Kalman Filters with Uncertainties of Noise Variances for Advanced Manufacturing
by Wenjuan Qi and Shigang Wang
Micromachines 2022, 13(8), 1216; https://doi.org/10.3390/mi13081216 - 29 Jul 2022
Cited by 2 | Viewed by 1093
Abstract
This paper addresses the robust Kalman filtering problem for multisensor time-varying systems with uncertainties of noise variances. Using the minimax robust estimation principle, based on the worst-case conservative system with the conservative upper bounds of noise variances, the robust local time-varying Kalman filters [...] Read more.
This paper addresses the robust Kalman filtering problem for multisensor time-varying systems with uncertainties of noise variances. Using the minimax robust estimation principle, based on the worst-case conservative system with the conservative upper bounds of noise variances, the robust local time-varying Kalman filters are presented. Further, the batch covariance intersection (BCI) fusion and a fast sequential covariance intersection (SCI) fusion robust time-varying Kalman filters are presented. They have the robustness that the actual filtering error variances or their traces are guaranteed to have a minimal upper bound for all admissible uncertainties of noise variances. Their robustness is proved based on the proposed Lyapunov equations approach. The concepts of the robust and actual accuracies are presented, and the robust accuracy relations are proved. It is also proved that the robust accuracies of the BCI and SCI fusers are higher than that of each local Kalman filter, the robust accuracy of the BCI fuser is higher than that of the SCI fuser, and the actual accuracies of each robust Kalman filter are higher than its robust accuracy for all admissible uncertainties of noise variances. The corresponding steady-state robust local and fused Kalman filters are also presented for multisensor time-invariant systems, and the convergence in a realization between the local and fused time-varying and steady-state Kalman filters is proved by the dynamic error system analysis (DESA) method and dynamic variance error system analysis (DVESA) method. A simulation example is given to verify the robustness and the correctness of the robust accuracy relations. Full article
(This article belongs to the Special Issue Advanced Manufacturing Technology and Systems, 2nd Edition)
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Review

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33 pages, 21559 KiB  
Review
Research Progress in Abrasive Water Jet Processing Technology
by Hongqi Wang, Ruifu Yuan, Xinmin Zhang, Penghui Zai and Junhao Deng
Micromachines 2023, 14(8), 1526; https://doi.org/10.3390/mi14081526 - 29 Jul 2023
Cited by 3 | Viewed by 2174
Abstract
Abrasive water jet machining technology is an unconventional special process technology; its jet stream has high energy, and its machining process is characterized by no thermal deformation, no pollution, high applicability, and high flexibility. It has been widely used for processing different types [...] Read more.
Abrasive water jet machining technology is an unconventional special process technology; its jet stream has high energy, and its machining process is characterized by no thermal deformation, no pollution, high applicability, and high flexibility. It has been widely used for processing different types of materials in different fields. This review elaborates on the basic principles and characteristics of abrasive water jet processing, the mechanism of erosion, the simulation of the processing, the influence of process parameters in machining removal, and the optimization of improvements, as well as introduces the current application status, new technology, and future development direction of abrasive water jet technology. This review can provide an important information reference for researchers studying the machining processing of abrasive water jet technology. Full article
(This article belongs to the Special Issue Advanced Manufacturing Technology and Systems, 2nd Edition)
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36 pages, 15875 KiB  
Review
Review of Visual Measurement Methods for Metal Vaporization Processes in Laser Powder Bed Fusion
by Jiaqi Liu, Bin Wei, Hongjie Chang, Jie Li and Guang Yang
Micromachines 2023, 14(7), 1351; https://doi.org/10.3390/mi14071351 - 30 Jun 2023
Viewed by 1345
Abstract
Laser powder bed fusion (LPBF) is of great importance for the visual measurement and analysis of the metallization process, which is the process of solid, liquid, and gas phase transformations of metal powders under high-energy laser irradiation due to the low boiling point/high [...] Read more.
Laser powder bed fusion (LPBF) is of great importance for the visual measurement and analysis of the metallization process, which is the process of solid, liquid, and gas phase transformations of metal powders under high-energy laser irradiation due to the low boiling point/high saturated vapor pressure. Since the evaporation of metals involves the interaction of driving forces such as vapor back pressure, surface tension, and gravity, the movement of the melt pool is not stable. At the same time, it also produces vaporization products such as vapor plumes and sprays, which cause defects such as bubbles, porosity, lack of fusion, inclusions, etc., during the manufacturing process of the parts, affecting the performance and manufacturing quality of the parts. More and more researchers are using imaging technologies, such as high-speed X-ray, high-speed visible light cameras, and high-speed schlieren imaging, to perform noncontact visual measurements and analyses of the melt pool, vapor plume, and spatter during the metal evaporation process, and the results show that the metal evaporation process can be suppressed by optimizing the process parameters and changing the processing atmosphere, thereby reducing part defects and improving part performance and built part quality. This paper reviews the research on metal evaporation mechanisms and visual measurement methods of metal evaporation, then discusses the measures of metal evaporation, and finally summarizes and prospects the future research hotspots of LPBF technology, according to the existing scholars’ research on numerical simulation analysis and visual measurement methods of the metal evaporation process. Full article
(This article belongs to the Special Issue Advanced Manufacturing Technology and Systems, 2nd Edition)
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