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Micromachines
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3D Printing of MEMS Technology, Volume II
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3D Printing of MEMS Technology, Volume II

A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "D3: 3D Printing and Additive Manufacturing".

Deadline for manuscript submissions: closed (31 January 2023) | Viewed by 11955

Special Issue Editor

Prof. Dr. Andrea Ehrmann

E-Mail Website
Guest Editor
Faculty of Engineering and Mathematics, Bielefeld University of Applied Sciences, Interaktion 1, 33619 Bielefeld, Germany
Interests: biopolymers; electrospinning; magnetism; spintronics; optics; dye-sensitized solar cells (DSSCs); smart textiles
Special Issues, Collections and Topics in MDPI journals

Special Issue Information

Dear Colleagues,

3D printing is currently an emerging technology. While it was mostly used for rapid prototyping previously, this technology has long entered rapid production, especially for complicated objects or small lot sizes. Most recently, new 3D printing technologies have emerged that enable the smallest features, at the micro- or even nano-scale, to be printed. At the same time, well-known problems, such as the waviness of fused deposition modeling (FDM) printed parts, the missing long-term stability of some typical printing materials, or the reduced mechanical properties of 3D-printed objects, still exist. The first Special Issue focussing on 3D printing of MEMS technology contains studies on various 3D printing techniques, underlining the possibilities provided by recent technologies.  We now welcome the most recent developments in this interdisciplinary research area for the second volume.

Prof. Dr. Andrea Ehrmann
Guest Editor

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Micromachines is an international peer-reviewed open access monthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2600 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

Keywords

  • 3D-printed nanostructures and nano-composites for application in MEMS lab-on-a-chip devices
  • microfluidics, microelectronics, micro-batteries and other energy storage devices
  • micro- and nano-sensors and actuators (physical, chemical, and biological)
  • challenges and possible solutions of using 3D printing technologies for MEMS
  • similar approaches related to 3D printing of MEMS technology

Related Special Issues

Published Papers (6 papers)

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Research

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13 pages, 3153 KiB  
Article
3D-Printed Microfluidic One-Way Valves and Pumps
by Hunter Hinnen, Matthew Viglione, Troy R. Munro, Adam T. Woolley and Gregory P. Nordin
Micromachines 2023, 14(7), 1286; https://doi.org/10.3390/mi14071286 - 23 Jun 2023
Cited by 3 | Viewed by 1975
Abstract
New microfluidic lab-on-a-chip capabilities are enabled by broadening the toolkit of devices that can be created using microfabrication processes. For example, complex geometries made possible by 3D printing can be used to approach microfluidic design and application in new or enhanced ways. In [...] Read more.
New microfluidic lab-on-a-chip capabilities are enabled by broadening the toolkit of devices that can be created using microfabrication processes. For example, complex geometries made possible by 3D printing can be used to approach microfluidic design and application in new or enhanced ways. In this paper, we demonstrate three distinct designs for microfluidic one-way (check) valves that can be fabricated using digital light processing stereolithography (DLP-SLA) with a poly(ethylene glycol) diacrylate (PEGDA) resin, each with an internal volume of 5–10 nL. By mapping flow rate to pressure in both the forward and reverse directions, we compare the different designs and their operating characteristics. We also demonstrate pumps for each one-way valve design comprised of two one-way valves with a membrane valve displacement chamber between them. An advantage of such pumps is that they require a single pneumatic input instead of three as for conventional 3D-printed pumps. We also characterize the achievable flow rate as a function of the pneumatic control signal period. We show that such pumps can be used to create a single-stage diffusion mixer with significantly reduced pneumatic drive complexity. Full article
(This article belongs to the Special Issue 3D Printing of MEMS Technology, Volume II)
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15 pages, 3870 KiB  
Article
Enhancement of Feed Source through Three Dimensional Printing
by Sujan Shrestha, Syed Muzahir Abbas, Mohsen Asadnia and Karu P. Esselle
Micromachines 2023, 14(6), 1244; https://doi.org/10.3390/mi14061244 - 13 Jun 2023
Viewed by 775
Abstract
The three-dimensional printed wideband prototype (WBP) was proposed, which is able to enhance the horn feed source by generating a more uniform phase distribution that is obtained after correcting aperture phase values. The noted phase variation obtained without the WBP was 163.65∘ [...] Read more.
The three-dimensional printed wideband prototype (WBP) was proposed, which is able to enhance the horn feed source by generating a more uniform phase distribution that is obtained after correcting aperture phase values. The noted phase variation obtained without the WBP was 163.65∘ for the horn source only, which was decreased to 19.68∘, obtained after the placement of the WBP at a λ/2 distance above the feed horn aperture. The corrected phase value was observed at 6.25 mm (0.25λ) above the top face of the WBP. The use of a five-layer cubic structure is able to generate the proposed WBP with dimensions of 105 mm × 105 mm × 37.5 mm (4.2λ× 4.2λ× 1.5λ), which can improve directivity and gain by 2.5 dB throughout the operating frequency range with a lower side lobe level. The overall dimension of the 3D printed horn was 98.5 mm × 75.6 mm × 192.6 mm (3.94λ× 3.02λ× 7.71λ), where the 100 % infill value was maintained. The horn was painted with a double layer of copper throughout its surface. In a design frequency of 12 GHz, the computed directivity, gain, side lobe level in H- and E- planes were 20.5 dB, 20.5 dB, −26.5 dB, and −12.4 dB with only a 3D printed horn case and, with the proposed prototype placed above this feed source, these values improved to 22.1 dB, 21.9 dB, −15.5 dB, and −17.5 dB, respectively. The realized WBP was 294 g and the overall system was 448 g in weight, which signifies a light weight condition. The measured return loss values were less than 2, which supports that the WBP has matching behavior over the operating frequency range. Full article
(This article belongs to the Special Issue 3D Printing of MEMS Technology, Volume II)
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20 pages, 3700 KiB  
Article
Development of 3D Printed Enzymatic Microreactors for Lipase-Catalyzed Reactions in Deep Eutectic Solvent-Based Media
by Myrto G. Bellou, Elena Gkantzou, Anastasia Skonta, Dimitrios Moschovas, Konstantinos Spyrou, Apostolos Avgeropoulos, Dimitrios Gournis and Haralambos Stamatis
Micromachines 2022, 13(11), 1954; https://doi.org/10.3390/mi13111954 - 11 Nov 2022
Cited by 9 | Viewed by 1589
Abstract
In this study, 3D printing technology was exploited for the development of immobilized enzyme microreactors that could be used for biocatalytic processes in Deep Eutectic Solvent (DES)-based media. 3D-printed polylactic acid (PLA) microwell plates or tubular microfluidic reactors were modified with polyethylenimine (PEI) [...] Read more.
In this study, 3D printing technology was exploited for the development of immobilized enzyme microreactors that could be used for biocatalytic processes in Deep Eutectic Solvent (DES)-based media. 3D-printed polylactic acid (PLA) microwell plates or tubular microfluidic reactors were modified with polyethylenimine (PEI) and lipase from Candida antarctica (CALB) was covalently immobilized in the interior of each structure. DESs were found to have a negligible effect on the activity and stability of CALB, and the system proved highly stable and reusable in the presence of DESs for the hydrolysis of p-nitrophenyl butyrate (p-NPB). A kinetic study under flow conditions revealed an enhancement of substrate accessibility in the presence of Betaine: Glycerol (Bet:Gly) DES, while the system was not severely affected by diffusion limitations. Incubation of microreactors in 100% Bet:Gly preserved the enzyme activity by 53% for 30 days of storage at 60 °C, while the buffer-stored sample had already been deactivated. The microfluidic enzyme reactor was efficiently used for the trans-esterification of ethyl ferulate (EF) with glycerol towards the production of glyceryl ferulate (GF), known for its antioxidant potential. The biocatalytic process under continuous flow conditions exhibited 23 times higher productivity than the batch reaction system. This study featured an effective and robust biocatalytic system with immobilized lipase that can be used both in hydrolytic and synthetic applications, while further optimization is expected to upgrade the microreactor system performance. Full article
(This article belongs to the Special Issue 3D Printing of MEMS Technology, Volume II)
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25 pages, 8807 KiB  
Article
Extrusion-Based 3D Printing of Stretchable Electronic Coating for Condition Monitoring of Suction Cups
by Van-Cuong Nguyen, Minh-Quyen Le, Jean-François Mogniotte, Jean-Fabien Capsal and Pierre-Jean Cottinet
Micromachines 2022, 13(10), 1606; https://doi.org/10.3390/mi13101606 - 27 Sep 2022
Cited by 5 | Viewed by 1809
Abstract
Suction cups (SCs) are used extensively by the industrial sector, particularly for a wide variety of automated material-handling applications. To enhance productivity and reduce maintenance costs, an online supervision system is essential to check the status of SCs. This paper thus proposes an [...] Read more.
Suction cups (SCs) are used extensively by the industrial sector, particularly for a wide variety of automated material-handling applications. To enhance productivity and reduce maintenance costs, an online supervision system is essential to check the status of SCs. This paper thus proposes an innovative method for condition monitoring of SCs coated with printed electronics whose electrical resistance is supposed to be correlated with the mechanical strain. A simulation model is first examined to observe the deformation of SCs under vacuum compression, which is needed for the development of sensor coating thanks to the 3D printing process. The proposed design involves three circle-shaped sensors, two for the top and bottom bellows (whose mechanical strains are revealed to be the most significant), and one for the lip (small strain, but important stress that might provoke wear and tear in the long term). For the sake of simplicity, practical measurement is performed on 2D samples coated with two different conductive inks subjected to unidirectional tensile loading. Graphical representations together with analytical models of both linear and nonlinear piezoresistive responses allows for the characterization of the inks’ behavior under several conditions of displacement and speed inputs. After a comparison of the two inks, the most appropriate is selected as a consequence of its excellent adhesion and stretchability, which are essential criteria to meet the target field. Room temperature extrusion-based 3D printing is then investigated using a motorized 3D Hyrel printer with a syringe-extrusion modular system. Design optimization is finally carried out to enhance the surface detection of sensitive elements while minimizing the effect of electrodes. Although several issues still need to be further considered to match specifications imposed by our industrial partner, the achievement of this work is meaningful and could pave the way for a new generation of SCs integrated with smart sensing devices. The 3D printing of conductive ink directly on the cup’s curving surface is a true challenge, which has been demonstrated, for the first time, to be technically feasible throughout the additive manufacturing (AM) process. Full article
(This article belongs to the Special Issue 3D Printing of MEMS Technology, Volume II)
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11 pages, 2198 KiB  
Article
Three-Dimensional Large-Scale Fused Silica Microfluidic Chips Enabled by Hybrid Laser Microfabrication for Continuous-Flow UV Photochemical Synthesis
by Aodong Zhang, Jian Xu, Yucen Li, Ming Hu, Zijie Lin, Yunpeng Song, Jia Qi, Wei Chen, Zhaoxiang Liu and Ya Cheng
Micromachines 2022, 13(4), 543; https://doi.org/10.3390/mi13040543 - 30 Mar 2022
Cited by 9 | Viewed by 2563
Abstract
We demonstrate a hybrid laser microfabrication approach, which combines the technical merits of ultrafast laser-assisted chemical etching and carbon dioxide laser-induced in situ melting for centimeter-scale and bonding-free fabrication of 3D complex hollow microstructures in fused silica glass. With the developed approach, large-scale [...] Read more.
We demonstrate a hybrid laser microfabrication approach, which combines the technical merits of ultrafast laser-assisted chemical etching and carbon dioxide laser-induced in situ melting for centimeter-scale and bonding-free fabrication of 3D complex hollow microstructures in fused silica glass. With the developed approach, large-scale fused silica microfluidic chips with integrated 3D cascaded micromixing units can be reliably manufactured. High-performance on-chip mixing and continuous-flow photochemical synthesis under UV irradiation at ~280 nm were demonstrated using the manufactured chip, indicating a powerful capability for versatile fabrication of highly transparent all-glass microfluidic reactors for on-chip photochemical synthesis. Full article
(This article belongs to the Special Issue 3D Printing of MEMS Technology, Volume II)
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Review

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28 pages, 8097 KiB  
Review
A Review on Additive Manufacturing of Functional Gradient Piezoceramic
by Anton Sotov, Artem Kantyukov, Anatoliy Popovich and Vadim Sufiiarov
Micromachines 2022, 13(7), 1129; https://doi.org/10.3390/mi13071129 - 17 Jul 2022
Cited by 8 | Viewed by 2443
Abstract
Functionally graded piezoceramics are a new generation of engineering materials whose final properties are determined by a chemical composition gradient (volume distribution), material microstructure, or design characteristics. This review analyzes possible ways to create a functionally graded piezoceramic material (gradient chemical composition, gradient [...] Read more.
Functionally graded piezoceramics are a new generation of engineering materials whose final properties are determined by a chemical composition gradient (volume distribution), material microstructure, or design characteristics. This review analyzes possible ways to create a functionally graded piezoceramic material (gradient chemical composition, gradient porosity—controlled and disordered porosity) by additive manufacturing methods, to control such materials’ functional characteristics. An analysis of the creation of gradient piezoceramics using binder jetting technology is presented in more detail. The review shows that today, the creation of functional gradient piezoceramics by additive manufacturing is a poorly-studied but promising research area, due to the rapid development of the additive manufacturing market and their unique features in shaping parts. Full article
(This article belongs to the Special Issue 3D Printing of MEMS Technology, Volume II)
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