Plasma Processing of Thin Films, Coatings, and Advanced Materials

A special issue of Coatings (ISSN 2079-6412). This special issue belongs to the section "Plasma Coatings, Surfaces & Interfaces".

Deadline for manuscript submissions: closed (31 December 2021) | Viewed by 19273

Special Issue Editors

1. Department of Chemical Engineering and Material Science, Michigan State University, East Lansing, MI 48824, USA
2. Department of Electrical Engineering and Computer Engineering, Michigan State University, East Lansing, MI 48824, USA
Interests: plasma sources; plasma enhanced processing; simulation
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Guest Editor
Fraunhofer Center for Coatings and Diamond Technologies, East Lansing, MI 48824, USA
Interests: plasma simulation; plasma surface engineering; gas discharge physics; physical vapor deposition; radio frequency discharges; magnetized plasmas
Special Issues, Collections and Topics in MDPI journals

Special Issue Information

Dear Colleagues,

We would like to invite you to submit your work to this Special Issue on “Plasma Processing of Thin Films, Coatings, and Advanced Materials”. Plasma-based surface processing is an important technology for manufacturing thin films, coatings, and advanced materials, which are widely used in the automotive, steel, biomedical, and electronics industries. The use of plasmas can provide activation energy to chemical reactions and additional kinetic energy to adatoms without delivering heat to the substrate surface, thereby providing a highly non-equilibrium enviroment, which cannot be achieved by conventional surface processing methods. Plasma processings can basically be decoupled into two processes. The influence of process parameters such as the input power, the working pressure, the gas type and flow rate, the electrode geometry, etc., on the plasma parameters, such as the plasma density and the electron temperature, and the influence of plasma parameters on the deposition rate and the properties of deposited films or synthesized materials. However, for a rapidly developing technique, it is often difficult to decouple these processes in real applications. Albeit a complete and in-depth understanding of these mechanisms is still very immature and limited, academic and research institutions around the world have made considerable progress on this topic. The development of new diagnostic and simulation tools has provided strong support for this progress. This Special Issue aims to introduce the latest experimental, computational, and theoretical developments in the field, through a series of original research papers and review articles from leading groups around the world.

In particular, the topics of interest include but are not limited to:

  • Fundamental understanding and new concepts of plasma–surface interactions;
  • Novel plasma-based thin film deposition and material synthesis technology;
  • Modeling and diagnostic methods of plasma surface processings;
  • Implementation of plasma surface processings for research and industrial applications.

Dr. Qihua Fan
Dr. Bocong Zheng
Guest Editors

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Coatings is an international peer-reviewed open access monthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2600 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

Keywords

  • plasma–surface interaction
  • thin film deposition
  • plasma simulation
  • plasma diagnosis
  • plasma surface treatment
  • plasma synthesis

Published Papers (6 papers)

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Research

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13 pages, 6711 KiB  
Article
Effect of the Dispersion State in Y5O4F7 Suspension on YOF Coating Deposited by Suspension Plasma Spray
by Seungjun Lee, Jaehoo Lee and Nongmoon Hwang
Coatings 2021, 11(7), 831; https://doi.org/10.3390/coatings11070831 - 09 Jul 2021
Cited by 3 | Viewed by 2708
Abstract
The stable Y5O4F7 suspension for dense yttrium oxyfluoride (YOF) coating by suspension plasma spraying (SPS) was developed. Electrostatically and electrosterically stabilized aqueous Y5O4F7 suspensions were prepared and compared with a commercially available Y [...] Read more.
The stable Y5O4F7 suspension for dense yttrium oxyfluoride (YOF) coating by suspension plasma spraying (SPS) was developed. Electrostatically and electrosterically stabilized aqueous Y5O4F7 suspensions were prepared and compared with a commercially available Y5O4F7 suspension without dispersant. The wettability and dispersibility of the Y5O4F7 suspensions were evaluated in terms of the zeta potential, average particle size, and size distribution with electrophoretic light scattering (ELS) and dynamic light scattering (DLS). The viscosity was measured and the sedimentation was tested to examine the fluidity and stability of the Y5O4F7 suspensions. When electrostatic (BYK-154) and electrosteric (BYK-199) dispersants were added to the Y5O4F7 suspension, the isoelectric point (IEP) of Y5O4F7 particles in the suspension shifted to lower pH. The zeta potential of both of electrostatically and electrosterically stabilized Y5O4F7 suspensions were higher than ±40 mV at pH of 8.6, respectively, which were much higher than of the Y5O4F7 suspension without dispersant. Meanwhile, the average particle size of the electrosterically stabilized Y5O4F7 suspension was much smaller than that of the electrostatically stabilized one. The electrosteric stabilization had a great effect on improving the wettability and dispersibility of the Y5O4F7 suspension. The coating rate of the electrosterically stabilized Y5O4F7 suspension was the highest among the three tested suspensions. In addition, the YOF coating deposited with the electrosterically stabilized Y5O4F7 suspension had the highest hardness and the lowest porosity. Full article
(This article belongs to the Special Issue Plasma Processing of Thin Films, Coatings, and Advanced Materials)
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13 pages, 3308 KiB  
Article
Friction and Wear Performance of CoCrFeMnNiW Medium-Entropy Alloy Coatings by Plasma-Arc Surfacing Welding on Q235 Steel
by Qingxian Hu, Xiaoli Wang, Junyan Miao, Fanglian Fu and Xinwang Shen
Coatings 2021, 11(6), 715; https://doi.org/10.3390/coatings11060715 - 15 Jun 2021
Cited by 4 | Viewed by 2041
Abstract
In this study, CoCrFeMnNiW medium-entropy alloy coating on Q235 was fabricated by plasma surfacing technology. The wear performance of the prepared one-layer coating and the two-layer coating was studied by a friction and abrasion tester. The microstructure and performance of the CoCrFeMnNiW coating [...] Read more.
In this study, CoCrFeMnNiW medium-entropy alloy coating on Q235 was fabricated by plasma surfacing technology. The wear performance of the prepared one-layer coating and the two-layer coating was studied by a friction and abrasion tester. The microstructure and performance of the CoCrFeMnNiW coating were researched by optical microscope, a nano-indentation test, SEM, and hardness tester. The results show that the microstructure of the coating is made up of a fusion zone, equiaxed dendrites near the fusion zone, coarse columnar crystals, and near-surface with a certain direction between the near-fusion zone and near-surface fine equiaxed grains. The wear mechanism of one layer coating was abrasive with wear and fatigue wear. The wear mechanism of the two-layer coating was adhesive with wear and fatigue wear. For CoCrFeMnNiW MEA coating, the main factors determining their wear resistance were the value of its depth recovery ratio (ηh) and EIT. Full article
(This article belongs to the Special Issue Plasma Processing of Thin Films, Coatings, and Advanced Materials)
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9 pages, 2621 KiB  
Article
Effect of Shroud in Plasma Spraying on Chemical Composition and Thickness of Titanium Coatings
by Hong Zhou and Cheng Peng
Coatings 2021, 11(4), 446; https://doi.org/10.3390/coatings11040446 - 13 Apr 2021
Cited by 2 | Viewed by 2008
Abstract
Titanium and its alloys are wildly used in industries. Shrouded plasma spray can be considered as a useful technology to produce low oxide containing titanium coatings. In this paper, the effect of shroud in plasma spraying on chemical composition and thickness of titanium [...] Read more.
Titanium and its alloys are wildly used in industries. Shrouded plasma spray can be considered as a useful technology to produce low oxide containing titanium coatings. In this paper, the effect of shroud in plasma spraying on chemical composition and thickness of titanium coatings were investigated. Shrouded plasma-sprayed titanium coatings were deposited onto mild steel substrates. Air plasma-sprayed titanium coatings were also deposited for comparison under the same spraying parameters. Those titanium coatings were then studied in terms of microstructure, oxygen and nitrogen contents and coating’s thickness. The titanium coatings were assessed by scanning electron microscopy and quantitative chemical analysis. The results showed that the shroud played a key role in protecting the particles from oxidation in flight. The shrouded titanium coatings exhibited lower oxygen content and an enhanced microstructure. The reduction in air entrainment with the shroud resulted in better heating of the particles and increases in deposition efficiency and coating thickness. Full article
(This article belongs to the Special Issue Plasma Processing of Thin Films, Coatings, and Advanced Materials)
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11 pages, 3278 KiB  
Article
Research on the Performance of Diamond-Like Carbon Coatings on Cutting Aluminum Alloy: Cutting Experiments and First-Principles Calculations
by Biao Huang, Er-geng Zhang, Qiong Zhou, Rong-chuan Lin and Hao-ming Du
Coatings 2021, 11(1), 63; https://doi.org/10.3390/coatings11010063 - 07 Jan 2021
Cited by 3 | Viewed by 1877
Abstract
The purpose of this study is to investigate the cutting performance of amorphous carbon (a-C) coatings and hydrogenated amorphous carbon (a-C:H) coatings on machining 2A50 aluminum alloy. First-principles molecular dynamics simulation was applied to investigate the effect of hydrogen on the interaction between [...] Read more.
The purpose of this study is to investigate the cutting performance of amorphous carbon (a-C) coatings and hydrogenated amorphous carbon (a-C:H) coatings on machining 2A50 aluminum alloy. First-principles molecular dynamics simulation was applied to investigate the effect of hydrogen on the interaction between coatings and workpiece. The cross-section topography and internal structure of a-C and a-C:H films were characterized by field emission scanning electron microscopy and Raman spectroscopy. The surface roughness of the deposited films and processed workpiece were measured using a white light interferometer. The results show that the a-C-coated tool had the highest service life of 121 m and the best workpiece surface quality (Sq parameter of 0.23 μm) while the workpiece surface roughness Sq parameter was 0.35 and 0.52 μm when machined by the a-C:H-coated and the uncoated tool, respectively. Meanwhile, the build-up edge was observed on the a-C:H-coated tool and a layer of aluminum alloy was observed to have adhered to the surface of the uncoated tool at its stable stage. An interface model that examined the interactions between H-terminated diamond (111)/Al(111) surfaces revealed that H atoms would move laterally with the action of cutting heat (549 K) and increase the interaction between a-C:H and Al surfaces; therefore, Al was prone to adhere to the a-C:H-coated tool surface. The a-C coating shows better performance on cutting aluminum alloy than the a-C:H coating. Full article
(This article belongs to the Special Issue Plasma Processing of Thin Films, Coatings, and Advanced Materials)
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11 pages, 4873 KiB  
Article
Plasma Etching Behavior of YOF Coating Deposited by Suspension Plasma Spraying in Inductively Coupled CHF3/Ar Plasma
by Seungjun Lee, Jaehoo Lee, Woongsik Kim and Nong-Moon Hwang
Coatings 2020, 10(11), 1023; https://doi.org/10.3390/coatings10111023 - 24 Oct 2020
Cited by 12 | Viewed by 5375
Abstract
Dense yttrium oxyfluoride (YOF) coating was successfully deposited by suspension plasma spraying (SPS) with coaxial feeding. After deposition for 6 min at a plasma power of 105 kW, the thickness of the YOF coating was 55 ± 3.2 µm with a porosity of [...] Read more.
Dense yttrium oxyfluoride (YOF) coating was successfully deposited by suspension plasma spraying (SPS) with coaxial feeding. After deposition for 6 min at a plasma power of 105 kW, the thickness of the YOF coating was 55 ± 3.2 µm with a porosity of 0.15% ± 0.01% and the coating rate was ~9.2 µm/min. The crystalline structure of trigonal YOF was confirmed by X-ray diffractometry (XRD). The etching behavior of the YOF coating was studied using inductively coupled CHF3/Ar plasma in comparison with those of the Al2O3 bulk and Y2O3 coating. Crater-like erosion sites and cavities were formed on the whole surface of the Al2O3 bulk and Y2O3 coating. In contrast, the surface of the YOF coating showed no noticeable difference before and after exposure to the CHF3/Ar plasma. Such high resistance of the YOF coating to fluorocarbon plasma comes from the strongly fluorinated layer on the surface. The fluorination on the surface of materials was confirmed by X-ray photoelectron spectrum analysis (XPS). Depth profiles of the compositions of Al2O3, Y2O3, and YOF samples by XPS revealed that the fluorination layer of the YOF coating was much thicker than those of Al2O3 and Y2O3. These results indicate that if the inner wall of the semiconductor process chamber is coated by YOF using SPS, the generation of contamination particles would be minimized during the fluorocarbon plasma etching process. Full article
(This article belongs to the Special Issue Plasma Processing of Thin Films, Coatings, and Advanced Materials)
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Review

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23 pages, 3096 KiB  
Review
Optimization of Surface Properties of Plasma Electrolytic Oxidation Coating by Organic Additives: A Review
by Mosab Kaseem and Burak Dikici
Coatings 2021, 11(4), 374; https://doi.org/10.3390/coatings11040374 - 24 Mar 2021
Cited by 25 | Viewed by 3829
Abstract
Plasma electrolytic oxidation (PEO) is an effective surface modification method for producing ceramic oxide layers on metals and their alloys. Although inorganic electrolytes are widely used in PEO, the organic additives have received considerable interest in the last decade due to their roles [...] Read more.
Plasma electrolytic oxidation (PEO) is an effective surface modification method for producing ceramic oxide layers on metals and their alloys. Although inorganic electrolytes are widely used in PEO, the organic additives have received considerable interest in the last decade due to their roles in improving the final voltage and controlling spark discharging, which lead to significant improvements in the performance of the obtained coatings. Therefore, this review summarized recent progress in the impacts of organic additives on the electrical response and the plasma discharges behavior during the PEO process. The detailed influence of organic additives, namely alcohols, organic acids, organic amines, organic acid salts, carbohydrate compounds, and surfactants on the corrosion behavior of PEO coatings is outlined. Finally, the future aspects and challenges that limit the industrial applications of PEO coating made in organic electrolytes are also highlighted. Full article
(This article belongs to the Special Issue Plasma Processing of Thin Films, Coatings, and Advanced Materials)
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