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Journal: J. Low Power Electron. Appl., 2016
Volume: 6
Number: 19

Article: InGaAs-OI Substrate Fabrication on a 300 mm Wafer
Authors: by Sebastien Sollier, Julie Widiez, Gweltaz Gaudin, Frederic Mazen, Thierry Baron, Mickail Martin, Marie-Christine Roure, Pascal Besson, Christophe Morales, Elodie Beche, Frank Fournel, Sylvie Favier, Amelie Salaun, Patrice Gergaud, Maryline Cordeau, Christellle Veytizou, Ludovic Ecarnot, Daniel Delprat, Ionut Radu and Thomas Signamarcheix

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