Influence of Fluorine and Nitrogen Co-Doping on the Structural and Morphological Properties of Sol-Gel ZnO Films
Abstract
:1. Introduction
2. Materials and Methods
2.1. Thin Film Preparation
2.2. Thin Film Characterization
3. Results and Discussions
3.1. XRD Analysis
3.2. FTIR Spectroscopy
3.3. Optical Characterization
3.4. FESEM Microscopy-Film Surface Morphology
4. Conclusions
Author Contributions
Funding
Institutional Review Board Statement
Informed Consent Statement
Data Availability Statement
Conflicts of Interest
References
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Material | 300 °C | 400 °C | 500 °C | 600 °C | |
---|---|---|---|---|---|
ZnO | Crystallite size [nm] | 9.91 | 12.17 | 25.66 | 29.96 |
a [Å] | 3.241 | 3.246 | 3.244 | 3.244 | |
c [Å] | 5.199 | 5.200 | 5.200 | 5.199 | |
c/a ratio | 1.60413 | 1.60197 | 1.60296 | 1.60265 | |
σfilm [GPa] | 26.41 | 21.94 | 21.94 | 26.41 | |
ZnO:F 0.1 | Crystallite size [nm] | 33.30 | 35.61 | ||
a [Å] | 3.244 | 3.244 | |||
c [Å] | 5.200 | 5.196 | |||
c/a ratio | 1.60296 | 1.60173 | |||
σfilm [GPa] | 21.94 | 39.84 | |||
ZnO:F 0.5 | Crystallite size [nm] | 26.92 | 38.63 | ||
a [Å] | 3.247 | 3.244 | |||
c [Å] | 5.199 | 5.199 | |||
c/a ratio | 1.60117 | 1.60265 | |||
σfilm [GPa] | 26.41 | 26.41 | |||
ZnO:N | Crystallite size [nm] | 10.65 | 15.43 | 27.00 | 31.84 |
a [Å] | 3.266 | 3.244 | 3.245 | 3.243 | |
c [Å] | 5.209 | 5.203 | 5.196 | 5.194 | |
c/a ratio | 1.59492 | 1.60388 | 1.60123 | 1.60160 | |
σfilm [GPa] | −18.35 | 8.50 | 39.84 | 48.79 | |
ZnO:N:F, Sol 1 | Crystallite size [nm] | 9.21 | 12.39 | 20.56 | 27.98 |
a [Å] | 3.248 | 3.245 | 3.242 | 3.245 | |
c [Å] | 5.200 | 5.201 | 5.197 | 5.198 | |
c/a ratio | 1.60099 | 1.60277 | 1.60302 | 1.60185 | |
σfilm [GPa] | 21.94 | 17.46 | 35.36 | 30.89 | |
ZnO:N:F, Sol 2 | Crystallite size [nm] | 11.34 | 12.64 | 17.07 | 24.79 |
a [Å] | 3.247 | 3.244 | 3.245 | 3.247 | |
c [Å] | 5.202 | 5.199 | 5,198 | 5.196 | |
c/a ratio | 1.60209 | 1.60265 | 1.60185 | 1.60025 | |
σfilm [GPa] | 12.98 | 26.41 | 30.89 | 39.84 | |
ZnO, wurtzite * a = 3.2489 Å; c = 5.2049 Å; c/a ratio = 1.60205 |
Material | 300 °C | 400 °C | 500 °C | 600 °C | ||||
---|---|---|---|---|---|---|---|---|
Taverage | Raverage | Taverage | Raverage | Taverage | Raverage | Taverage | Raverage | |
ZnO | 80.60 | 9.00 | 82.57 | 8.39 | 78.90 | 9.78 | 77.90 | 12.60 |
ZnO:F 0.1 | 86.74 | 8.64 | 83.60 | 11.13 | ||||
ZnO:F 0.5 | 90.98 | 7.74 | 86.89 | 10.47 | ||||
ZnO:N:F, Sol 1 | 84.75 | 8.12 | 88.18 | 6.40 | 86.65 | 8.25 | 82.62 | 7.88 |
ZnO:N:F, Sol 2 | 76.27 | 4.46 | 74.89 | 3.93 | 76.12 | 3.93 | 68.42 | 4.10 |
ZnO | ZnO:F 0.1 | ZnO:F 0.5 | ZnO:N | ZnO:N:F, Sol 1 | ZnO:N:F, Sol 2 | |
---|---|---|---|---|---|---|
ε | 1.20099 | 0.85441 | 0.95776 | 1.19558 | 1.12218 | 1.30293 |
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Ivanova, T.; Harizanova, A.; Koutzarova, T.; Vertruyen, B.; Closset, R. Influence of Fluorine and Nitrogen Co-Doping on the Structural and Morphological Properties of Sol-Gel ZnO Films. Coatings 2022, 12, 1874. https://doi.org/10.3390/coatings12121874
Ivanova T, Harizanova A, Koutzarova T, Vertruyen B, Closset R. Influence of Fluorine and Nitrogen Co-Doping on the Structural and Morphological Properties of Sol-Gel ZnO Films. Coatings. 2022; 12(12):1874. https://doi.org/10.3390/coatings12121874
Chicago/Turabian StyleIvanova, Tatyana, Antoaneta Harizanova, Tatyana Koutzarova, Benedicte Vertruyen, and Raphael Closset. 2022. "Influence of Fluorine and Nitrogen Co-Doping on the Structural and Morphological Properties of Sol-Gel ZnO Films" Coatings 12, no. 12: 1874. https://doi.org/10.3390/coatings12121874