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Mechanism of the Wake-Up and the Split-Up in AlOx/Hf0.5Zr0.5Ox Film

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Journal: Nanomaterials, 2023
Volume: 13
Number: 2187

Article: Yttrium Doping Effects on Ferroelectricity and Electric Properties of As-Deposited Hf1−xZrxO2 Thin Films via Atomic Layer Deposition
Authors: by Youkyoung Oh, Seung Won Lee, Jeong-Hun Choi, Seung-Eon Ahn, Hyo-Bae Kim and Ji-Hoon Ahn

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