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Journal: Micromachines, 2023
Volume: 14
Number: 2003

Article: Towards High-Temperature MEMS: Two-Step Annealing Suppressed Recrystallization in Thin Multilayer Pt-Rh/Zr Films
Authors: by Georgii A. Pleshakov, Ivan A. Kalinin, Alexey V. Ivanov, Ilya V. Roslyakov, Igor V. Yaminsky and Kirill S. Napolskii

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