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Journal: Micromachines, 2023
Volume: 14
Number: 1908

Article: Fabrication of a Highly NO2-Sensitive Gas Sensor Based on a Defective ZnO Nanofilm and Using Electron Beam Lithography
Authors: by Zhifu Feng, Damiano Giubertoni, Alessandro Cian, Matteo Valt, Matteo Ardit, Andrea Pedrielli, Lia Vanzetti, Barbara Fabbri, Vincenzo Guidi and Andrea Gaiardo

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