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Journal: Micromachines, 2021
Volume: 12
Number: 1590

Article: Using Modified-Intake Plasma-Enhanced Metal–Organic Chemical Vapor Deposition System to Grow Gallium Doped Zinc Oxide
Authors: by Po-Hsun Lei, Jia-Jan Chen, Ming-Hsiu Song, Yuan-Yu Zhan and Zong-Lin Jiang
Link: https://www.mdpi.com/2072-666X/12/12/1590

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